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Title: Cryo nanomanipulator probe with integrated gas injection

Patent ·
OSTI ID:1860128

A probe assembly for use with a charged particle instrument includes an elongate body having a proximal end for positioning outside of a charged particle instrument enclosed environment, a distal end for positioning within the enclosed environment and a longitudinal axis. A port interface is located on the body between the proximal and distal ends, and is coupleable to a nanomanipulator system of the charged particle instrument. A probe needle is positioned at a distal end of the body and is selectively positionable from outside the enclosed environment to contact a specimen within the enclosed environment. At least one gas injection needle is adjustably positioned near the probe needle. The gas injection needle is connectable to a source of pressurized gas to selectively inject gas in the area of the probe needle within the enclosed environment.

Research Organization:
Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-76RL01830
Assignee:
Battelle Memorial Institute (Richland, WA)
Patent Number(s):
11,189,458
Application Number:
16/748,705
OSTI ID:
1860128
Resource Relation:
Patent File Date: 01/21/2020
Country of Publication:
United States
Language:
English

References (7)

Material processing system and method patent-application May 2005
Devices and methods for cryo lift-out with in situ probe patent-application February 2013
Method for Processing Samples Held by a Nanomanipulator patent-application February 2013
Charged particle instruments patent November 2019
Method for Measuring a Distance of a Component from an Object and for Setting a Position of a Component in a Particle Beam Device patent-application April 2016
Beam-induced deposition at cryogenic temperatures patent August 2014
Multiple sample attachment to nano manipulator for high throughput sample preparation patent May 2014

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