Effects of particle inclusions on cracking in ultrathin barrier films

Singh, Ankit Kumar; Kim, Kyungjin; Chou, Wen-Fang; Jia, Xiaojia; Fuentes-Hernandez, Canek; Kippelen, Bernard; Graham, Samuel

doi:10.1016/j.tsf.2020.138387

Title: Effects of particle inclusions on cracking in ultrathin barrier films

Journal Article · Mon Oct 12 00:00:00 EDT 2020 · Thin Solid Films

DOI:https://doi.org/10.1016/j.tsf.2020.138387· OSTI ID:1850341

^[1]; Kim, Kyungjin ^[1]; Chou, Wen-Fang ^[1]; Jia, Xiaojia ^[1]; Fuentes-Hernandez, Canek ^[1];

^[1]; Graham, Samuel ^[1]

Georgia Institute of Technology, Atlanta, GA (United States)

Here, the effects of particle inclusions with different mechanical properties on the development of cracks in ultra-thin barrier films have been studied. Two types of particles, alumina and poly(styrene-b-methyl methacrylate) with large differences in their elastic modulus were used, representing both hard and soft inclusions. Particles were seeded onto polyethylene naphthalate substrates and subsequently coated with atomic layer deposited Al₂O₃ as a barrier film. Ca corrosion tests used to determine the performance of the barrier films revealed that soft polymer particle inclusions severely affect the development of cracking in barrier films as compared to stiff ceramic particles. Tensile tests also confirmed that the barrier films with polymer particle inclusions have the lowest value of critical onset strain. Parametric simulations, conducted by varying the elastic modulus of the particle inclusions over a wide range, resulted in a larger strain energy release rate near particle inclusions which promotes crack formation and negatively impacts the performance of barrier films with softer particle inclusions. Thus, the combination of high residual stresses in the barrier films with the presence of soft particle inclusions is found the most detrimental for the development of high-performance ultrathin barrier films.

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Research Organization:: North Carolina State University, Raleigh, NC (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA); US Department of the Navy, Office of Naval Research (ONR); US Air Force Office of Scientific Research (AFOSR)

Grant/Contract Number:: NA0002576; N00014-14-1-0580; N00014-16-1-2520; FA9550-16-1-0168

OSTI ID:: 1850341

Alternate ID(s):: OSTI ID: 1776248

Journal Information:: Thin Solid Films, Vol. 714, Issue C; ISSN 0040-6090

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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36 MATERIALS SCIENCE
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ultrathin barrier films
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particle inclusion
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Title: Effects of particle inclusions on cracking in ultrathin barrier films

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