Machine learning detection and classification of defects in STM lithography data.
Conference
·
OSTI ID:1822623
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- DOE Contract Number:
- NA0003525
- OSTI ID:
- 1822623
- Report Number(s):
- SAND2020-10119C; 690838
- Resource Relation:
- Conference: Proposed for presentation at the CINT User's Meeting.
- Country of Publication:
- United States
- Language:
- English
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