High temperature substrate heater for use in high and ultra-high vacuum systems

Patent · Tue Mar 09 00:00:00 EST 2021

OSTI ID:1805620

Dowden, Paul; Jia, Quanxi

A braze-free substrate heating device including a heater block body, a heater block lid, and a heating element. The heating element sits inside the heater block body. The heater block lid is on the heating element, such that the heating element is sandwiched between the heater block lid and the floor of the heater block body. The heating element is held in place by compressing the heater block lid into the heater block body and attaching the heater block lid to the top of the heater block body so that the heating element is fully supported over its surface area, and can maintain uniform thermal contact with the heater block lid and heater block body over its entire surface area.

• Research Organization: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC52-06NA25396
• Assignee: Triad National Security, LLC (Los Alamos, NM)
• Patent Number(s): 10,945,311
• Application Number: 15/801,261
• OSTI ID: 1805620
• Resource Relation: Patent File Date: 11/01/2017
• Country of Publication: United States
• Language: English