Characterization of an RF-driven argon plasma at atmospheric pressure using broadband absorption and optical emission spectroscopy

Nayak, G.; Simeni, M. Simeni; Rosato, J.; Sadeghi, N.; Bruggeman, P. J.

doi:10.1063/5.0035488

Title: Characterization of an RF-driven argon plasma at atmospheric pressure using broadband absorption and optical emission spectroscopy

Journal Article · Mon Dec 28 00:00:00 EST 2020 · Journal of Applied Physics

DOI:https://doi.org/10.1063/5.0035488· OSTI ID:1787633

^[1];

^[1]; Rosato, J. ^[2]; Sadeghi, N. ^[3];

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Univ. of Minnesota, Minneapolis, MN (United States)
Aix-Marseille Univ., Marseille (France)
Univ. Grenoble-Alpes & CNRS (France)

Atmospheric pressure plasmas in argon are of particular interest due to the production of highly excited and reactive species enabling numerous plasma-aided applications. In this contribution, we report on absolute optical emission and absorption spectroscopy of a radio frequency (RF) driven capacitively coupled argon glow discharge operated in a parallel-plate configuration. This enabled the study of all key parameters including electron density and temperature, gas temperature, and absolute densities of atoms in highly electronically excited states. The space and time-averaged electron density and temperature were determined from the measurement of the absolute intensity of the electron-atom bremsstrahlung in the visible range. Considering the non-Maxwellian electron energy distribution function, an electron temperature (T_e) of 2.1 eV and an electron density (n_e) of 1.1 × 10¹⁹ m^–3 were obtained. The time-averaged and spatially resolved absolute densities of atoms in the metastable (1s₅ and 1s₃) and resonant (1s₄ and 1s₂) states of argon in pure Ar and Ar/He mixture were obtained by broadband absorption spectroscopy. The 1s₅ metastable atoms had the largest density near the sheath region with a maximum value of 8 × 10¹⁷ m^–3, while all other 1s states had densities of at most 2 × 10¹⁷ m^–3. Here, the dominant production and loss mechanisms of these atoms were discussed, in particular, the role of radiation trapping. We conclude with a comparison of the plasma properties of the argon RF glow discharges with the more common He equivalent and highlight their differences.

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Research Organization:: Univ. of Minnesota, Minneapolis, MN (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Fusion Energy Sciences (FES); USDOE Office of Science (SC), Engineering & Technology. Office of Accelerator R&D and Production

Grant/Contract Number:: SC0020232; AT4010100; SC-0020232

OSTI ID:: 1787633

Alternate ID(s):: OSTI ID: 1752973; OSTI ID: 1969842

Journal Information:: Journal of Applied Physics, Vol. 128, Issue 24; ISSN 0021-8979

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Title: Characterization of an RF-driven argon plasma at atmospheric pressure using broadband absorption and optical emission spectroscopy

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