Apparatus, method and system for imaging and utilization of SEM charged particles
A scanning electron microscope (SEM) system includes an SEM objective that emits an electron beam toward a sample, causing emission of charged particles including secondary electrons, Auger electrons, backscattered electrons, anions and cations. The SEM system includes electron optics elements that are configured to establish electric fields around the sample that accelerate charged particles toward a detector. A two-dimensional distribution of locations of incidence of the charged particles on the detector is indicative of energies of the charged particles and their emission angles from the sample. A three-dimensional spatial distribution of charged particles emitted from the sample is recovered by performing an Abel transform over the distribution on the detector. The energies and emission angles of the charged particles are then determined from the three-dimensional spatial distribution.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- NA0003525
- Assignee:
- National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
- Patent Number(s):
- 10,770,262
- Application Number:
- 16/198,356
- OSTI ID:
- 1735243
- Resource Relation:
- Patent File Date: 11/21/2018
- Country of Publication:
- United States
- Language:
- English
Similar Records
Monte Carlo simulation study of scanning Auger electron images
Identification, characterization, and modeling of charged clusters and microdroplets emitted from liquid-metal ion sources