Fabrication of Ultrathin Integrated Multilayer Capacitors by Chemical Solution Deposition.

Conference · Fri Jun 01 00:00:00 EDT 2007

OSTI ID:1724174

Brennecka, Geoffrey L.; Tuttle, Bruce; Parish, Chad Michael; Brewer, Luke N.; McKenzie, Bonnie Beth

Abstract not provided.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1724174
• Report Number(s): SAND2007-3868P; 523347
• Resource Relation: Conference: Proposed for presentation at the PReSS (Post-doc and Recent Staff Semiars) Series held May 17, 2007 in Albuquerque, NM.
• Country of Publication: United States
• Language: English