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Title: Resolving Triblock Terpolymer Morphologies by Vapor-Phase Infiltration

Journal Article · · Chemistry of Materials

The spontaneous formation of well-organized three-dimensional (3D) nanostructures from self-assembled block copolymers (BCPs) holds promise for nanofabrication and lithography. The addition of a third block to BCPs provides access to a plethora of 3D geometries, but it remains difficult to resolve the geometry of such “three-color” structures when there is low contrast between the polymeric components at length scales of a few nm. Here, we apply vapor-phase infiltration synthesis to a silicon-containing triblock terpolymer, poly(1,1- dimethyl silacyclobutane-b-styrene-b-lactide) (PDMSB-b-PS-b-PLA or DSL) to distinguish the 3D microdomain morphologies of the two organic blocks, PLA and PS. Selective infiltration of ZnO within the PLA microdomains reveals morphologies consisting of three-color lamellae or lamellae combined with vertically aligned core-shell cylinders, depending on the volume fractions of each block. The infiltration produces ZnO nanoparticles throughout the 260 nm thickness of the DSL film, generating 3D nanocomposites containing ZnO and SiOx. These results provide a strategy for synthesizing multicomponent 3D nanostructures as well as visualizing the phase behavior of multi-block copolymers.

Research Organization:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
SC0012704
OSTI ID:
1644000
Report Number(s):
BNL-216195-2020-JAAM; 1520-5002
Journal Information:
Chemistry of Materials, Vol. 32, Issue 12; ISSN 0897-4756
Publisher:
American Chemical Society (ACS)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 11 works
Citation information provided by
Web of Science

References (56)

Three-dimensional integration of nanotechnologies for computing and data storage on a single chip journal July 2017
Layer-by-Layer Assembly of Nanowires for Three-Dimensional, Multifunctional Electronics journal March 2007
Three-Dimensional Self-Assembly of Core/Shell-Like Nanostructures for High-Performance Nanocomposite Permanent Magnets journal August 2016
Three-dimensional nanomagnetism journal June 2017
Three-Dimensional Nanostructures for Photonics journal March 2010
Blue-phase templated fabrication of three-dimensional nanostructures for photonic applications journal May 2012
Three-Dimensional Nanofabrication by Block Copolymer Self-Assembly journal April 2014
Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films journal June 2012
Universal perpendicular orientation of block copolymer microdomains using a filtered plasma journal July 2019
Non-native three-dimensional block copolymer morphologies journal December 2016
Imparting Superhydrophobicity with a Hierarchical Block Copolymer Coating journal December 2019
Three-Dimensional Self-Assembly of Spherical Block Copolymer Domains into V-Shaped Grooves journal October 2006
Double-Layer Morphologies from a Silicon-Containing ABA Triblock Copolymer journal May 2018
Synthesis of orthogonally assembled 3D cross-stacked metal oxide semiconducting nanowires journal December 2019
Hierarchical Templating of a BiFeO 3 –CoFe 2 O 4 Multiferroic Nanocomposite by a Triblock Terpolymer Film journal August 2014
Templated Self-Assembly of Square Symmetry Arrays from an ABC Triblock Terpolymer journal December 2009
Highly Ordered Square Arrays from a Templated ABC Triblock Terpolymer journal July 2011
Block copolymer self-assembly–directed synthesis of mesoporous gyroidal superconductors journal January 2016
Triblock-Terpolymer-Directed Self-Assembly of Mesoporous TiO2: High-Performance Photoanodes for Solid-State Dye-Sensitized Solar Cells journal April 2012
A 3D Optical Metamaterial Made by Self-Assembly journal October 2011
Rational design of ABC triblock terpolymer solution nanostructures with controlled patch morphology journal June 2016
Bulk morphologies of polystyrene-block-polybutadiene-block-poly(tert-butyl methacrylate) triblock terpolymers journal August 2015
In Situ Study of ABC Triblock Terpolymer Self-Assembly under Solvent Vapor Annealing journal February 2019
Synthesis and Bulk Self-Assembly of ABC Star Terpolymers with a Polyferrocenylsilane Metalloblock journal March 2013
Bicontinuous Network Nanostructure with Tunable Thickness Formed on Asymmetric Triblock Terpolymer Thick Films journal June 2019
Pattern transfer using block copolymers
  • Gu, Xiaodan; Gunkel, Ilja; Russell, Thomas P.
  • Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 371, Issue 2000 https://doi.org/10.1098/rsta.2012.0306
journal October 2013
Greatly Increased Toughness of Infiltrated Spider Silk journal April 2009
Sequential Vapor Infiltration of Metal Oxides into Sacrificial Polyester Fibers: Shape Replication and Controlled Porosity of Microporous/Mesoporous Oxide Monoliths journal August 2011
Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers journal September 2010
A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates journal May 2011
Characterizing the Three-Dimensional Structure of Block Copolymers via Sequential Infiltration Synthesis and Scanning Transmission Electron Tomography journal May 2015
Strategies for Inorganic Incorporation using Neat Block Copolymer Thin Films for Etch Mask Function and Nanotechnological Application journal January 2016
Using Cylindrical Domains of Block Copolymers To Self-Assemble and Align Metallic Nanowires journal February 2008
Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition journal September 2018
Enhanced Hybridization and Nanopatterning via Heated Liquid-Phase Infiltration into Self-Assembled Block Copolymer Thin Films journal December 2019
Highly Ordered Nanoring Arrays Formed by Templated Si-Containing Triblock Terpolymer Thin Films journal January 2017
The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective journal November 2019
Effect of Nanostructured Domains in Self-Assembled Block Copolymer Films on Sequential Infiltration Synthesis journal November 2017
Gyroid-Structured 3D ZnO Networks Made by Atomic Layer Deposition journal September 2013
Sub-50-nm self-assembled nanotextures for enhanced broadband antireflection in silicon solar cells journal January 2015
Photoluminescence Mechanism and Photocatalytic Activity of Organic–Inorganic Hybrid Materials Formed by Sequential Vapor Infiltration journal April 2016
Periodic Bicontinuous Structures Formed on the Top Surface of Asymmetric Triblock Terpolymer Thick Films journal July 2019
Chemically Enhancing Block Copolymers for Block-Selective Synthesis of Self-Assembled Metal Oxide Nanostructures journal December 2012
Infiltrated Zinc Oxide in Poly(methyl methacrylate): An Atomic Cycle Growth Study journal December 2016
Sequential Infiltration Synthesis of Doped Polymer Films with Tunable Electrical Properties for Efficient Triboelectric Nanogenerator Development journal July 2015
Hydrophilic mechanical buffer layers and stable hydrophilic finishes on polydimethylsiloxane using combined sequential vapor infiltration and atomic/molecular layer deposition
  • Gong, Bo; Spagnola, Joseph C.; Parsons, Gregory N.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 1 https://doi.org/10.1116/1.3670963
journal January 2012
Vapor phase infiltration (VPI) for transforming polymers into organic–inorganic hybrid materials: a critical review of current progress and future challenges journal January 2017
Sequential Infiltration Synthesis of Electronic Materials: Group 13 Oxides via Metal Alkyl Precursors journal June 2019
Effect of the Micelle Opening in Self-assembled Amphiphilic Block Co-polymer Films on the Infiltration of Inorganic Precursors journal January 2019
Interfacial Staining of a Phase-Separated Block Copolymer with Ruthenium Tetroxide journal March 2007
Direct imaging of polyethylene crystallites within block copolymer microdomains journal January 2000
Ruthenium tetraoxide staining of polymers for electron microscopy journal July 1983
Quantitative Three-Dimensional Characterization of Block Copolymer Directed Self-Assembly on Combined Chemical and Topographical Prepatterned Templates journal January 2017
The Mechanism of TBD-Catalyzed Ring-Opening Polymerization of Cyclic Esters journal November 2007
Morphology Control in Block Copolymer Films Using Mixed Solvent Vapors journal August 2012
Photonic Crystals: Three-Dimensional Nanostructures for Photonics (Adv. Funct. Mater. 7/2010) journal March 2010