Wearable Microfluidic Diaphragm Pressure Sensor for Health and Tactile Touch Monitoring

Gao, Yuji; Ota, Hiroki; Schaler, Ethan W.; Chen, Kevin; Zhao, Allan; Gao, Wei; Fahad, Hossain M.; Leng, Yonggang; Zheng, Anzong; Xiong, Furui; Zhang, Chuchu; Tai, Li-Chia; Zhao, Peida; Fearing, Ronald S.; Javey, Ali

doi:10.1002/adma.201701985

Title: Wearable Microfluidic Diaphragm Pressure Sensor for Health and Tactile Touch Monitoring

Journal Article · Fri Aug 18 00:00:00 EDT 2017 · Advanced Materials

DOI:https://doi.org/10.1002/adma.201701985· OSTI ID:1642665

Gao, Yuji ^[1]; Ota, Hiroki ^[2]; Schaler, Ethan W. ^[3]; Chen, Kevin ^[2]; Zhao, Allan ^[3]; Gao, Wei ^[2]; Fahad, Hossain M. ^[3]; Leng, Yonggang ^[4]; Zheng, Anzong ^[5]; Xiong, Furui ^[4]; Zhang, Chuchu ^[3]; Tai, Li-Chia ^[2]; Zhao, Peida ^[2]; Fearing, Ronald S. ^[3]; Javey, Ali ^[2]

Univ. of California, Berkeley, CA (United States); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Tianjin Univ. (China)
Univ. of California, Berkeley, CA (United States); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Univ. of California, Berkeley, CA (United States)
Tianjin Univ. (China)
Bournemouth Univ. (United Kingdom)

Flexible pressure sensors have many potential applications in wearable electronics, robotics, health monitoring, and more. In particular, liquid-metal-based sensors are especially promising as they can undergo strains of over 200% without failure. However, current liquid-metal-based strain sensors are incapable of resolving small pressure changes in the few kPa range, making them unsuitable for applications such as heart-rate monitoring, which require a much lower pressure detection resolution. In this paper, a microfluidic tactile diaphragm pressure sensor based on embedded Galinstan microchannels (70 µm width × 70 µm height) capable of resolving sub-50 Pa changes in pressure with sub-100 Pa detection limits and a response time of 90 ms is demonstrated. An embedded equivalent Wheatstone bridge circuit makes the most of tangential and radial strain fields, leading to high sensitivities of a 0.0835 kPa^-1 change in output voltage. The Wheatstone bridge also provides temperature self-compensation, allowing for operation in the range of 20–50 °C. Finally, as examples of potential applications, a polydimethylsiloxane (PDMS) wristband with an embedded microfluidic diaphragm pressure sensor capable of real-time pulse monitoring and a PDMS glove with multiple embedded sensors to provide comprehensive tactile feedback of a human hand when touching or holding objects are demonstrated.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES), Materials Sciences & Engineering Division; National Science Foundation (NSF)

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1642665

Journal Information:: Advanced Materials, Vol. 29, Issue 39; ISSN 0935-9648

Publisher:: WileyCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 347 works

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