MEMS terahertz-to-infrared band converter using frequency selective planar metamaterial

Alves, Fabio; Pimental, Leroy; Grbovic, Dragoslav; Karunasiri, Gamani

doi:10.1038/s41598-018-30858-z

Title: MEMS terahertz-to-infrared band converter using frequency selective planar metamaterial

Journal Article · Mon Aug 20 00:00:00 EDT 2018 · Scientific Reports

DOI:https://doi.org/10.1038/s41598-018-30858-z· OSTI ID:1624419

Alves, Fabio ^[1]; Pimental, Leroy ^[1]; Grbovic, Dragoslav ^[1]; Karunasiri, Gamani ^[1]

Naval Postgraduate School, Monterey, CA (United States). Dept. of Physics

A MEMS terahertz-to-infrared converter has been developed based on the unique properties of metamaterials that allow for selective control of the absorptivity and emissivity of the sensors. The converter consists of a sensing element structurally made of planar metamaterial membranes, connected to a substrate frame by four symmetrically-located thermal insulators. Upon THz absorption, the temperature of the sensing element increases and the outward infrared flux from the backside of the element is read by a commercial long-wave infrared camera. Two configurations were designed and fabricated with metamaterial absorptivity optimized for 3.8THz and 4.75THz quantum cascade lasers. The first sensor, fabricated with an oxidized aluminum backside, exhibits higher responsivity, but lower conversion efficiency than the second sensor, fabricated with a metamaterial backside. The spectral characteristics of the metamaterial on the two sides can be optimized to improve both responsivity and sensitivity, while keeping the sensors’ thermal time constant sufficiently small for real time imaging. No dedicated electronics or optics are required for readout making metamaterial-based MEMS THz-to-IR converters very attractive for THz imaging as means of a simple attachment to commercial IR cameras.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1624419

Journal Information:: Scientific Reports, Vol. 8, Issue 1; ISSN 2045-2322

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

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