Diagnostics of inductively coupled chlorine plasmas: Measurements of the neutral gas temperature
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October 2000 |
Behavior of excited argon atoms in inductively driven plasmas
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June 2000 |
On the OES line-ratio technique in argon and argon-containing plasmas
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October 2014 |
Density of atoms in Ar*(3p 5 4s) states and gas temperatures in an argon surfatron plasma measured by tunable laser spectroscopy
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April 2013 |
Rate constants and quenching mechanisms for the metastable states of argon, krypton, and xenon
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November 1978 |
Capacitive discharges driven by combined dc/rf sources
- Kawamura, E.; Lieberman, M. A.; Lichtenberg, A. J.
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 25, Issue 5
https://doi.org/10.1116/1.2771561
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January 2007 |
Apparatus and method for plasma processing of SRF cavities
- Upadhyay, J.; Im, Do; Peshl, J.
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Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 818
https://doi.org/10.1016/j.nima.2016.02.049
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May 2016 |
Application of excitation cross sections to optical plasma diagnostics
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May 2004 |
Simplified Model for Ionization and Recombination in a Hydrogenic Plasma with Resonance Radiation Trapping
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December 1970 |
Application of RF Discharges to Sputtering
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March 1970 |
Effect of self-bias on cylindrical capacitive discharge for processing of inner walls of tubular structures—Case of SRF cavities
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August 2018 |
Optical emission measurements of electron energy distributions in low-pressure argon inductively coupled plasmas
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October 2010 |
The Role of Argon Metastables in an Inductively Coupled Plasma for Treatment of PET: The Role of Argon Metastables in an Inductively Coupled Plasma
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January 2014 |
Novel geometry for single-mode scanning of tunable lasers
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January 1981 |
Cryogenic rf test of the first SRF cavity etched in an rf Ar/Cl 2 plasma
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December 2017 |
Effect of Cl 2 additions to an argon glow discharge
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February 1994 |
Particle-in-cell simulation of electron and ion energy distributions in dc/rf hybrid capacitively-coupled plasmas
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March 2013 |
Escape factors for Paschen 2p–1s emission lines in low-temperature Ar, Kr, and Xe plasmas
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May 2016 |
The spatially resolved measurements of the atomic densities in argon Paschen 1s levels by OES in a capacitively coupled plasma
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July 2011 |
Bias voltage in finite length, cylindrical and coaxial radio‐frequency discharges
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May 1990 |
Negative ion densities in chlorine- and boron trichloride-containing inductively coupled plasmas
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July 1997 |
Secondary electrons in rf and dc/rf capacitive discharges
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August 2008 |
A robust method to measure metastable and resonant state densities from emission spectra in argon and argon-diluted low pressure plasmas
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February 2008 |
Measurement of electron-impact excitation cross sections out of metastable levels of argon and comparison with ground-state excitation
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April 1999 |
Argon 420.1–419.8 nm emission line ratio for measuring plasma effective electron temperatures
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January 2012 |
Measurement of metastable and resonance level densities in rare-gas plasmas by optical emission spectroscopy
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June 2009 |
Transport mechanisms of metastable and resonance atoms in a gas discharge plasma
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February 2013 |
Ion energy distributions in a dc biased rf discharge
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April 1997 |
Cavity preparation/assembly techniques and impact on Q, realistic Q-factors in a module, review of modules
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February 2006 |
Measurement of Ar resonance and metastable level number densities in argon containing plasmas
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August 2017 |
Hybrid simulation of a dc-enhanced radio-frequency capacitive discharge in hydrogen
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April 2012 |
Etching mechanism of niobium in coaxial Ar/Cl 2 radio frequency plasma
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March 2015 |
Imprisonment of Resonance Radiation in Gases
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December 1947 |
Electron-impact excitation of argon: Optical emission cross sections in the range of 300–2500nm
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November 2007 |
Application of the escape factor method for determination of excited states densities in a low-pressure argon radio-frequency discharge
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August 2013 |
Reversal of the asymmetry in a cylindrical coaxial capacitively coupled Ar/Cl 2 plasma
- Upadhyay, Janardan; Im, Do; Popović, Svetozar
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 6
https://doi.org/10.1116/1.4932562
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November 2015 |
Simple, low-noise piezo driver with feed-forward for broad tuning of external cavity diode lasers
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February 2018 |
Relative intensity of helium spectral lines as a function of electron temperature and density
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January 1967 |
Determination of state-to-state electron-impact rate coefficients between Ar excited states: a review of combined diagnostic experiments in afterglow plasmas
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June 2016 |
Optical emission spectroscopy in low-temperature plasmas containing argon and nitrogen: determination of the electron temperature and density by the line-ratio method
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September 2010 |
Nonlinear excitation and dissociation kinetics in discharges through mixtures of rare and attaching gases
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November 1988 |
metastable level density and temperature measurement in a low-density argon plasma
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May 1997 |
Optical diagnostics for characterization of electron energy distributions: argon inductively coupled plasmas
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August 2011 |
Noninvasive, real-time measurements of plasma parameters via optical emission spectroscopy
- Wang, Shicong; Wendt, Amy E.; Boffard, John B.
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 31, Issue 2
https://doi.org/10.1116/1.4792671
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March 2013 |
Application of rf discharges to sputtering
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January 2000 |