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Title: Monolithic collimator and energy analyzer for ion spectrometry

Patent ·
OSTI ID:1600254

Disclosed are various examples related to ion or particle spectrometry utilizing a monolithic collimator and energy analyzer. In one example, a particle selection device includes a single substrate including a curved channel energy analyzer section and a straight channel collimator section, wherein particles pass through the collimator section and enter the energy analyzer section of the substrate. The channel outlets in the collimator section are aligned with the channel inlets of the energy analyzer section. Electric and/or magnetic fields can be applied across the channels of the energy analyzer for ion or particle discrimination. A particle detector at the outlet of the energy analyzer section can provide indications of detected ions and/or particles.

Research Organization:
West Virginia Univ., Morgantown, WV (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
SC0013841
Assignee:
West Virginia University (Morgantown, WV)
Patent Number(s):
10,468,241
Application Number:
15/479,231
OSTI ID:
1600254
Resource Relation:
Patent File Date: 04/04/2017
Country of Publication:
United States
Language:
English

References (4)

Monolithic Collimator and Energy Analyzer for Ion Spectrometry patent-application October 2017
Ultra-compact plasma spectrometer patent November 2016
Imaging Device and Method patent-application October 2008
Ion Beam Apparatus and Method for Ion Implantation patent-application August 2009