Bifurcation diagram and dynamic response of a MEMS resonator with a 1:3 internal resonance

Czaplewski, David A.; Strachan, Scott; Shoshani, Oriel; Shaw, Steven W.; López, Daniel

doi:10.1063/1.5099459

Title: Bifurcation diagram and dynamic response of a MEMS resonator with a 1:3 internal resonance

Journal Article · Tue Jun 25 00:00:00 EDT 2019 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.5099459· OSTI ID:1570436

^[1]; Strachan, Scott ^[2];

^[3]; Shaw, Steven W. ^[4];

^[1]

Argonne National Lab. (ANL), Lemont, IL (United States)
Michigan State Univ., East Lansing, MI (United States)
Ben-Gurion Univ. of the Negev, Beer-Sheva (Israel)
Florida Inst. of Technology, Melbourne, FL (United States)

Here, the dynamic response of a nonlinear resonator in the presence of resonant mode coupling is studied experimentally and theoretically. For the case of a clamped-clamped beam resonator in the presence of a 1:3 internal resonance, we show that at the onset of internal resonance, steady state oscillations cannot be sustained. At higher drive levels, stable oscillations can be maintained but the resonator amplitude undergoes amplitude modulated responses. In this work, we utilize these dynamic responses to build a bifurcation diagram that can be described remarkably well with a simple model consisting of a Duffing resonator coupled to a linear one.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC); National Science Foundation (NSF)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1570436

Alternate ID(s):: OSTI ID: 1529407

Journal Information:: Applied Physics Letters, Vol. 114, Issue 25; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 34 works

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Demonstration of Multiple Internal Resonances in a Microelectromechanical Self-Sustained Oscillator Houri, S.; Hatanaka, D.; Asano, M. Physical Review Applied, Vol. 13, Issue 1 https://doi.org/10.1103/physrevapplied.13.014049	journal	January 2020

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Title: Bifurcation diagram and dynamic response of a MEMS resonator with a 1:3 internal resonance

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