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Title: Electron beam masks for compressive sensors

Patent ·
OSTI ID:1490037

Transmission microscopy imaging systems include a mask and/or other modulator situated to encode image beams, e.g., by deflecting the image beam with respect to the mask and/or sensor. The beam is modulated/masked either before or after transmission through a sample to induce a spatially and/or temporally encoded signal by modifying any of the beam/image components including the phase/coherence, intensity, or position of the beam at the sensor. For example, a mask can be placed/translated through the beam so that several masked beams are received by a sensor during a single sensor integration time. Images associated with multiple mask displacements are then used to reconstruct a video sequence using a compressive sensing method. Another example of masked modulation involves a mechanism for phase-retrieval, whereby the beam is modulated by a set of different masks in the image plane and each masked image is recorded in the diffraction plane.

Research Organization:
Battelle Memorial Institute, Richland, WA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-03ER46057; AC05-76RL01830
Assignee:
Battelle Memorial Institute (Richland, WA)
Patent Number(s):
10,109,453
Application Number:
15/075,031
OSTI ID:
1490037
Resource Relation:
Patent File Date: 2016 Mar 18
Country of Publication:
United States
Language:
English

References (112)

Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method patent-application May 2012
System for Improved Compressive Tomography and Method Therefor patent-application December 2015
Methods and Devices for High Throughput Crystal Structure Analysis by Electron Diffraction patent-application September 2011
Generalized Alternating Projection for Weighted-$\ell_{2,1}$ Minimization with Applications to Model-Based Compressive Sensing journal January 2014
Secondary electron emission due to primary and backscattered electrons journal September 1972
Phase plate and method of fabricating same patent September 2014
Methods and apparatus to capture compressed images patent February 2012
Scanning Transmission Electron Microscopy for Polymer Sequencing patent-application May 2013
Compressed sensing journal April 2006
Charged Particle Microscope With Special Aperture Plate patent-application April 2016
Compressive Sensing on Manifolds Using a Nonparametric Mixture of Factor Analyzers: Algorithm and Performance Bounds journal December 2010
Calibration camera with spectral depth patent May 2012
TEM with Aberration Corrector and Phase Plate patent-application August 2009
Coded aperture compressive temporal imaging journal January 2013
Testing method for semiconductor device, testing apparatus therefor, and semiconductor device suitable for the test patent December 2008
Method for Compressive Sensing, Reconstruction, and Estimation of Ultra-Wideband Channels patent-application May 2014
Scanning electron microscope patent May 2015
Penetration and energy-loss theory of electrons in solid targets journal January 1972
Methods for Achieving High Resolution Microfluoroscopy patent-application October 2005
Aberration-Correcting Dark-Field Electron Microscopy patent-application August 2011
Markov Chain Sampling Methods for Dirichlet Process Mixture Models journal June 2000
Einstein's Proposal of the Photon Concept—a Translation of the Annalen der Physik Paper of 1905 journal May 1965
Low-Cost Compressive Sensing for Color Video and Depth conference September 2014
Compressive Transmission Microscopy patent-application September 2016
System and method for compressive scanning electron microscopy patent January 2015
Electron tomography based on a total variation minimization reconstruction technique journal February 2012
Compressive sensor array system and method patent November 2010
Phase Plate patent-application August 2013
Face recognition using Laplacianfaces journal March 2005
Photoluminescence from colour centres generated in lithium fluoride thin films and crystals by extreme-ultraviolet irradiation
  • Nichelatti, E.; Almaviva, S.; Bonfigli, F.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 268, Issue 19, p. 3035-3039 https://doi.org/10.1016/j.nimb.2010.05.034
journal October 2010
On-Chip Thin Film Zernike Phase Plate and Applications Thereof patent-application June 2014
Comparison of optimal performance at 300keV of three direct electron detectors for use in low dose electron microscopy journal December 2014
Scanning interference electron microscope patent August 2008
Method of using a phase plate in a transmission electron microscope patent September 2015
Quantitative Measurement of the Surface Self-Diffusion on Au Nanoparticles by Aberration-Corrected Transmission Electron Microscopy journal February 2012
Phase Contrast Imaging Using Patterned Illumination/Detector and Phase Mask patent-application February 2015
Apparatuses And Methods For Three-Dimensional Imaging Of An Object patent-application October 2016
Super-resolution in optical data storage journal December 1999
Adaptive temporal compressive sensing for video conference February 2013
Gaussian mixture model for video compressive sensing conference September 2013
High-resolution amplitude contrast imaging patent August 2016
TEM Phase Contrast Imaging With Image Plane Phase Grating patent-application January 2017
Ăśber einen die Erzeugung und Verwandlung des Lichtes betreffenden heuristischen Gesichtspunkt [AdP 17, 132 (1905)] journal February 2005
Fast electron microscopy via compressive sensing patent December 2014
Transmission Electron Microscope patent-application September 2011
Temporal Compressive Sensing Systems patent-application May 2017
Scanning interference electron microscopy patent March 1994
Electron lithography using a photocathode patent March 1995
Ultra high-density optical data storage: information retrieval an order of magnitude beyond the Rayleigh limit journal December 2002
Differential phase contrast scanning transmission electron microscope patent April 1991
Device manufacture involving lithographic processing patent November 1993
Projecting type charged particle microscope and projecting type substrate inspection system patent October 2001
Detector system for use with transmission electron microscope spectroscopy patent December 2012
Phase Plate And Electron Microscope patent-application August 2014
Scanning Electron Microscope And Scanning Transmission Electron Microscope patent-application May 2014
Element mapping unit, scanning transmission electron microscope, and element mapping method patent April 2011
Microfabricated High-Bandpass Foucault Aperture For Electron Microscopy patent-application April 2013
Phase-Shifting Mask of Method of Fabricating Same patent-application October 2008
In Situ Observation of the Electrochemical Lithiation of a Single SnO2 Nanowire Electrode journal December 2010
Towards a Mathematical Theory of Super-resolution journal April 2013
The restricted isometry property and its implications for compressed sensing journal May 2008
Imaging a Sample in a TEM Equipped with a Phase Plate patent-application March 2014
Mathematical image assembly in a scanning-type microscope patent April 2017
Probabilistic Principal Component Analysis journal August 1999
Incoherent transmission electron microscopy patent June 2014
Emergence of simple-cell receptive field properties by learning a sparse code for natural images journal June 1996
The potential for Bayesian compressive sensing to significantly reduce electron dose in high-resolution STEM images journal October 2013
In Situ Transmission Electron Microscopy journal February 2008
Detector system for transmission electron microscope patent December 2012
Phase contrast electron microscope patent-application December 2007
Beam Sensing patent-application July 2011
Method and Apparatus for Observing, Detecting and Correcting Periodic Structures in a Moving Web patent January 1972
Towards 0.1 nm resolution with the first spherically corrected transmission electron microscope journal January 1998
Method of forming a semiconductor device utilizing lithographic mask and mask therefor patent September 2000
Mixtures of Probabilistic Principal Component Analyzers journal February 1999
Controlled Growth of Nanoparticles from Solution with In Situ Liquid Transmission Electron Microscopy journal July 2011
Mathmatical Image Assembly in a Scanning-Type Microscope patent-application December 2015
A New TwIST: Two-Step Iterative Shrinkage/Thresholding Algorithms for Image Restoration journal December 2007
Charging of a hole-free thin film phase plate patent July 2014
Test Method of Mask for Electron-Beam Exposure and Method of Electron-Beam Exposure patent-application December 2001
Compressive Sensing [Lecture Notes] journal August 2007
Nonparametric Bayesian Dictionary Learning for Analysis of Noisy and Incomplete Images journal January 2012
Electron beam drawing mask blank, electron beam drawing mask, and method of manufacturing the same patent November 2004
A tutorial on Bayesian nonparametric models journal February 2012
A Simple Proof of the Restricted Isometry Property for Random Matrices journal January 2008
Transmission Electron Microscope Provided with Electronic Spectroscope patent-application August 2008
Apparatus and method for acquiring light field data using variable modulator patent February 2014
Scanning Transmission Electron Microscope and Scanning Transmission Electron Microscopy patent-application October 2007
Robust uncertainty principles: exact signal reconstruction from highly incomplete frequency information journal February 2006
Advances in the environmental transmission electron microscope (ETEM) for nanoscale in situ studies of gas–solid interactions journal January 2014
Ponderomotive phase plate for transmission electron microscopes patent July 2012
Method of producing a stencil mask patent March 1995
Phase plate for a TEM patent July 2014
Method, Device and System for Measuring Nanoscale Deformations patent-application October 2010
Visualizing Gas Molecules Interacting with Supported Nanoparticulate Catalysts at Reaction Conditions journal January 2012
Compressive sampling for multimedia coding patent October 2013
Method and Apparatus for Compressive Imaging Device patent-application October 2006
Lens system for phase plate for transmission electron microscope and transmission electron microscope patent-application October 2002
Apparatus and method of pattern detection based on a scanning transmission electron microscope patent September 1991
Dictionary Learning for Noisy and Incomplete Hyperspectral Images journal January 2012
Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus patent November 2010
High-speed multiframe dynamic transmission electron microscope image acquisition system with arbitrary timing patent October 2015
Reduced-dose and high-speed acquisition strategies for multi-dimensional electron microscopy journal May 2015
Sparse Sampling And Reconstruction For Electron And Scanning Probe Microscope Imaging patent-application March 2015
$rm K$-SVD: An Algorithm for Designing Overcomplete Dictionaries for Sparse Representation journal November 2006
A (S)TEM Gas Cell Holder with Localized Laser Heating for In Situ Experiments journal March 2013
Detector System for Use with Transmission Electron Microscope Spectroscopy patent-application March 2012
In situ Transmission Electron Microscopy of catalyst sintering journal December 2013
Observation apparatus and observation method using an electron beam patent-application January 2003
Method Of Examining A Sample In A Charged-Particle Microscope patent-application August 2015
Image resolution and sensitivity in an environmental transmission electron microscope journal November 2012
Method and apparatus for compressive domain filtering and interference cancellation patent May 2014

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