skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Mesoscopic Elastic Distortions in GaAs Quantum Dot Heterostructures

Journal Article · · Nano Letters
 [1];  [1];  [1];  [1];  [2];  [3];  [3];  [4];  [4];  [4];  [4]; ORCiD logo [1]
  1. Univ. of Wisconsin, Madison, WI (United States). Dept. of Materials Science & Engineering
  2. Argonne National Lab. (ANL), Argonne, IL (United States). Center for Nanoscale Materials
  3. Swiss Federal Inst. of Technology in Zurich (ETH Zurich) (Switzerland). Lab. for Solid State Physics
  4. Delft Univ. of Technology (Netherlands). QuTech. Kavli Inst. of NanoScience

Quantum devices formed in high-electron-mobility semiconductor heterostructures provide a route through which quantum mechanical effects can be exploited on length scales accessible to lithography and integrated electronics. The electrostatic definition of quantum dots in semiconductor heterostructure devices intrinsically involves the lithographic fabrication of intricate patterns of metallic electrodes. The formation of metal/semiconductor interfaces, growth processes associated with polycrystalline metallic layers, and differential thermal expansion produce elastic distortion in the active areas of quantum devices. Understanding and controlling these distortions present a significant challenge in quantum device development. In this paper, we report synchrotron X-ray nanodiffraction measurements combined with dynamical X-ray diffraction modeling that reveal lattice tilts with a depth-averaged value up to 0.04° and strain on the order of 10–4 in the two-dimensional electron gas (2DEG) in a GaAs/AlGaAs heterostructure. Elastic distortions in GaAs/AlGaAs heterostructures modify the potential energy landscape in the 2DEG due to the generation of a deformation potential and an electric field through the piezoelectric effect. Finally, the stress induced by metal electrodes directly impacts the ability to control the positions of the potential minima where quantum dots form and the coupling between neighboring quantum dots.

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States); Univ. of Wisconsin, Madison, WI (United States); Delft Univ. of Technology (Netherlands)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF); Netherlands Organisation for Scientific Research (NWO)
Grant/Contract Number:
AC02-06CH11357; FG02-04ER46147; DGE-1256259; DMR-1121288; DMR-1720415
OSTI ID:
1461309
Journal Information:
Nano Letters, Vol. 18, Issue 5; ISSN 1530-6984
Publisher:
American Chemical SocietyCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 16 works
Citation information provided by
Web of Science

References (43)

Electron transport through double quantum dots journal December 2002
Spins in few-electron quantum dots journal October 2007
Silicon quantum electronics journal July 2013
Embracing the quantum limit in silicon computing journal November 2011
Theory of potential modulation in lateral surface superlattices journal February 1994
Nanoscale Distortions of Si Quantum Wells in Si/SiGe Quantum-Electronic Heterostructures journal July 2012
Elastic and piezoelectric fields around a buried quantum dot: A simple picture journal August 1998
Ballistic transport of (001) GaAs two-dimensional holes through a strain-induced lateral superlattice journal March 2012
Formation of strain-induced quantum dots in gated semiconductor nanostructures journal August 2015
Anisotropic Fermi contour of (001) GaAs electrons in parallel magnetic fields journal September 2013
Electronic Transport in Mesoscopic Systems book January 2013
Origin of Compressive Residual Stress in Polycrystalline Thin Films journal March 2002
The dynamic competition between stress generation and relaxation mechanisms during coalescence of Volmer–Weber thin films journal May 2001
Crystallite coalescence: A mechanism for intrinsic tensile stresses in thin films journal August 1999
Grain Growth and Stress Relief in Thin Films journal January 1972
Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal history journal March 1987
Stresses in thin film metallization
  • Hodge, T. C.; Bidstrup-Allen, S. A.; Kohl, P. A.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A, Vol. 20, Issue 2 https://doi.org/10.1109/95.588580
journal June 1997
Effect of Different Substrate Temperatures on Microstru- cture and Residual Stress of Ti Films journal April 2016
Internal Stress of Evaporated Thin Gold Films journal April 1965
Film Stress Influence of Bilayer Metallization on the Structure of RF MEMS Switches journal January 1999
Stresses induced in GaAs by TiPt ohmic contacts journal November 1983
Physics of strain effects in semiconductors and metal-oxide-semiconductor field-effect transistors journal May 2007
Theory of potential modulation in lateral surface superlattices. II.  Piezoelectric effect journal December 1997
Anisotropic piezoelectric effect in lateral surface superlattices journal February 1997
Enhanced X‐Ray Diffraction from Substrate Crystals Containing Discontinuous Surface Films journal June 1967
Mechanics of edge effects in anisotropic thin film∕substrate systems journal November 2006
Stress distributions in silicon crystal substrates with thin films journal April 1981
Combining experiment and optical simulation in coherent X-ray nanobeam characterization of Si/SiGe semiconductor heterostructures journal July 2016
Strain Imaging of Nanoscale Semiconductor Heterostructures with X-Ray Bragg Projection Ptychography journal April 2014
Imaging Local Polarization in Ferroelectric Thin Films by Coherent X-Ray Bragg Projection Ptychography journal April 2013
Three-dimensional high-resolution quantitative microscopy of extended crystals journal September 2011
Nondestructive three-dimensional imaging of crystal strain and rotations in an extended bonded semiconductor heterostructure journal November 2015
Semiconducting and other major properties of gallium arsenide journal October 1982
Modeling of kinematic diffraction from a thin silicon film illuminated by a coherent, focused X-ray nanobeam journal April 2010
Darwin theory of heterostructure diffraction journal April 1995
XXXIV. The theory of X-ray reflexion journal February 1914
LXXVIII. The theory of X-ray reflexion. Part II journal April 1914
Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging journal January 2011
Electrode-stress-induced nanoscale disorder in Si quantum electronic devices journal June 2016
Potential modulation by strain in lateral surface superlattices journal July 1999
Residual strain and piezoelectric effects in passivated GaAs/AlGaAs core-shell nanowires journal May 2013
Quantum dot defined in a two-dimensional electron gas at a n Al Ga As Ga As heterojunction: Simulation of electrostatic potential and charging properties journal March 2008
Anisotropic Disorder in High-Mobility 2D Heterostructures and Its Correlation to Electron Transport journal August 2001

Cited By (3)

Heterointerface‐Driven Band Alignment Engineering and its Impact on Macro‐Performance in Semiconductor Multilayer Nanostructures journal April 2019
Spin–phonon interactions in silicon carbide addressed by Gaussian acoustics journal February 2019
Electrode-induced lattice distortions in GaAs multi-quantum-dot arrays journal March 2019