TEM Sample Preparation and FIB-Induced Damage

Mayer, Joachim; Giannuzzi, Lucille A.; Kamino, Takeo; Michael, Joseph

doi:10.1557/mrs2007.63

Title: TEM Sample Preparation and FIB-Induced Damage

Journal Article · Tue May 01 00:00:00 EDT 2007 · MRS Bulletin

DOI:https://doi.org/10.1557/mrs2007.63· OSTI ID:1426988

Mayer, Joachim; Giannuzzi, Lucille A.; Kamino, Takeo; Michael, Joseph

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

DOE Contract Number:: AC04-94AL85000

OSTI ID:: 1426988

Report Number(s):: SAND2007-0680J; applab; 524111

Journal Information:: MRS Bulletin, Vol. 32, Issue 05; ISSN 0883-7694

Publisher:: Materials Research Society

Country of Publication:: United States

Language:: English

References (31)

Copper device editing: Strategy for focused ion beam milling of copper Casey, J. David; Phaneuf, Michael; Chandler, Clive Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6 https://doi.org/10.1116/1.1521736	journal	January 2002
Site-specific Transmission Electron Microscope Characterization of Micrometer-sized Particles Using the Focused Ion Beam Lift-out Technique Lomness, Janice K.; Giannuzzi, Lucille A.; Hampton, Michael D. Microscopy and Microanalysis, Vol. 7, Issue 05 https://doi.org/10.1017/S1431927601010418	journal	September 2001
Converting polycrystals into single crystals – Selective grain growth by high-energy ion bombardment Olliges, Sven; Gruber, Patric; Bardill, Anita Acta Materialia, Vol. 54, Issue 20 https://doi.org/10.1016/j.actamat.2006.07.005	journal	December 2006
A review of focused ion beam milling techniques for TEM specimen preparation Giannuzzi, L. A.; Stevie, F. A. Micron, Vol. 30, Issue 3 https://doi.org/10.1016/S0968-4328(99)00005-0	journal	June 1999
Surface damage induced by focused-ion-beam milling in a Si/Si p–n junction cross-sectional specimen Wang, Zhouguang; Kato, Takeharu; Hirayama, Tsukasa Applied Surface Science, Vol. 241, Issue 1-2 https://doi.org/10.1016/j.apsusc.2004.09.092	journal	February 2005
Combining Ar ion milling with FIB lift-out techniques to prepare high quality site-specific TEM samples Huang, Z. Journal of Microscopy, Vol. 215, Issue 3 https://doi.org/10.1111/j.0022-2720.2004.01376.x	journal	September 2004
Gallium Phase Formation in Cu During 30kV Ga+ FIB Milling Michael, Jr Microscopy and Microanalysis, Vol. 12, Issue S02 https://doi.org/10.1017/S1431927606062015	journal	July 2006
Focused ion beam milling of vitreous water: prospects for an alternative to cryo-ultramicrotomy of frozen-hydrated biological samples Marko, M.; Hsieh, C.; Moberlychan, W. Journal of Microscopy, Vol. 222, Issue 1 https://doi.org/10.1111/j.1365-2818.2006.01567.x	journal	April 2006
EFTEM Analysis of FIB Sections: An Important Tool in Nanotechnology Mayer, J.; Weirich, T. E. Microscopy and Microanalysis, Vol. 11, Issue S02 https://doi.org/10.1017/S1431927605503428	journal	August 2005
Combined Tripod Polishing and Fib Method for Preparing Semiconductor Plan View Specimens Anderson, Ron; Klepeis, Stanley J. MRS Proceedings, Vol. 480 https://doi.org/10.1557/PROC-480-187	journal	January 1997
Applications of focused ion beams in microelectronics production, design and development Stevie, F. A.; Shane, T. C.; Kahora, P. M. Surface and Interface Analysis, Vol. 23, Issue 2 https://doi.org/10.1002/sia.740230204	journal	February 1995
Surface damage formation during ion-beam thinning of samples for transmission electron microscopy McCaffrey, J. P.; Phaneuf, M. W.; Madsen, L. D. Ultramicroscopy, Vol. 87, Issue 3 https://doi.org/10.1016/S0304-3991(00)00096-6	journal	April 2001
Strategies for fabricating atom probe specimens with a dual beam FIB Miller, M. K.; Russell, K. F.; Thompson, G. B. Ultramicroscopy, Vol. 102, Issue 4 https://doi.org/10.1016/j.ultramic.2004.10.011	journal	March 2005
Evaluation of TEM samples of an Mg-Al alloy prepared using FIB milling at the operating voltages of 10 kV and 40 kV Kamino, T. Journal of Electron Microscopy, Vol. 53, Issue 5 https://doi.org/10.1093/jmicro/dfh058	journal	October 2004
Fabrication of 12 nm electrically variable shallow junction metal–oxide–semiconductor field effect transistors on silicon on insulator substrates Henschel, W.; Wahlbrink, T.; Georgiev, Y. M. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6 https://doi.org/10.1116/1.1621670	journal	January 2003
Using the FIB to characterize nanoparticle materials Perrey, C. R.; Carter, C. B.; Michael, J. R. Journal of Microscopy, Vol. 214, Issue 3 https://doi.org/10.1111/j.0022-2720.2004.01325.x	journal	June 2004
Crystallographic analysis of thin specimens Sivel, V. G. M.; Tichelaar, F. D.; Mohdadi, H. Journal of Microscopy, Vol. 218, Issue 2 https://doi.org/10.1111/j.1365-2818.2005.01475.x	journal	May 2005
Method for Cross-sectional Transmission Electron Microscopy Specimen Preparation of Composite Materials Using a Dedicated Focused Ion Beam System Yaguchi, Toshie; Kamino, Takeo; Ishitani, Tohru Microscopy and Microanalysis, Vol. 5, Issue 5 https://doi.org/10.1017/S1431927699000203	journal	September 1999
Minimization of Ga Induced FIB Damage Using Low Energy Clean-up Thompson, K.; Gorman, B.; Larson, D. Microscopy and Microanalysis, Vol. 12, Issue S02 https://doi.org/10.1017/S1431927606065457	journal	July 2006
Reversible orientation-biased grain growth in thin metal films induced by a focused ion beam Spolenak, R.; Sauter, L.; Eberl, C. Scripta Materialia, Vol. 53, Issue 11 https://doi.org/10.1016/j.scriptamat.2005.07.030	journal	December 2005
Reducing focused ion beam damage to transmission electron microscopy samples Kato, N. I. Journal of Electron Microscopy, Vol. 53, Issue 5 https://doi.org/10.1093/jmicro/dfh080	journal	October 2004
Focused ion-beam milling for field-ion specimen preparation: Larson, D. J.; Foord, D. T.; Petford-Long, A. K. Ultramicroscopy, Vol. 75, Issue 3 https://doi.org/10.1016/S0304-3991(98)00058-8	journal	December 1998
Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system Langford, R. M.; Huang, Y. Z.; Lozano-Perez, S. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 19, Issue 3 https://doi.org/10.1116/1.1371317	journal	January 2001
Novel scheme for the preparation of transmission electron microscopy specimens with a focused ion beam Overwijk, M. H. F. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 11, Issue 6 https://doi.org/10.1116/1.586537	journal	November 1993
Information storage materials: nanoscale characterisation by three-dimensional atom probe analysis Larson, D. J.; Petford-Long, A. K.; Ma, Y. Q. Acta Materialia, Vol. 52, Issue 10 https://doi.org/10.1016/j.actamat.2004.03.015	journal	June 2004
Application of a FIB-STEM system for 3D observation of a resin-embedded yeast cell Kamino, T. Journal of Electron Microscopy, Vol. 53, Issue 5 https://doi.org/10.1093/jmicro/dfh063	journal	October 2004
Field-ion specimen preparation using focused ion-beam milling Larson, D. J.; Foord, D. T.; Petford-Long, A. K. Ultramicroscopy, Vol. 79, Issue 1-4 https://doi.org/10.1016/S0304-3991(99)00055-8	journal	September 1999
Introduction to Focused Ion Beams Giannuzzi, Lucille A.; Stevie, Fred A. Springer New York, NY https://doi.org/10.1007/b101190	book	January 2005
Effects of diffusion induced recrystallization on volume diffusion in the copper-nickel system Schwarz, S. M.; Kempshall, B. W.; Giannuzzi, L. A. Acta Materialia, Vol. 51, Issue 10 https://doi.org/10.1016/S1359-6454(03)00082-X	journal	June 2003
Application of focused ion beam lift-out specimen preparation to TEM, SEM, STEM, AES and SIMS analysis Stevie, F. A.; Vartuli, C. B.; Giannuzzi, L. A. Surface and Interface Analysis, Vol. 31, Issue 5 https://doi.org/10.1002/sia.1063	journal	January 2001
A method for multidirectional TEM observation of a specific site at atomic resolution Kamino, T. Journal of Electron Microscopy, Vol. 53, Issue 6 https://doi.org/10.1093/jmicro/dfh089	journal	December 2004

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