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Title: Method of making thermally-isolated silicon-based integrated circuits

Patent ·
OSTI ID:1409829
; ; ;

Thermally isolated devices may be formed by performing a series of etches on a silicon-based substrate. As a result of the series of etches, silicon material may be removed from underneath a region of an integrated circuit (IC). The removal of the silicon material from underneath the IC forms a gap between remaining substrate and the integrated circuit, though the integrated circuit remains connected to the substrate via a support bar arrangement that suspends the integrated circuit over the substrate. The creation of this gap functions to release the device from the substrate and create a thermally-isolated integrated circuit.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
Patent Number(s):
9,824,932
Application Number:
15/234,932
OSTI ID:
1409829
Resource Relation:
Patent File Date: 2016 Aug 11
Country of Publication:
United States
Language:
English

References (17)

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MEMS resonators and method for manufacturing MEMS resonators patent-application October 2002
Structure of and method for fabricating electro-optic devices utilizing a compliant substrate patent-application January 2003
Microelectronic mechanical system and methods patent-application July 2003
Low temperature bi-CMOS compatible process for MEMS RF resonators and filters patent-application April 2009
Flow Sensor and Method of Fabrication patent-application April 2010
Micro Electronic Device And Method For Fabricating Micro Electromechanical System Resonator Thereof patent-application February 2011
Uncooled Infrared Detector And Methods For Manufacturing The Same patent-application October 2011
Method Of Forming An Electromechanical Transducer Device patent-application March 2012
Piezoelectric Device and Method for Manufacturing Piezoelectric Device patent-application August 2012
Integrated Circuit With MEMS Element And Manufacturing Method Thereof patent-application February 2014
CMOS-SOI-MEMS Transistor for Uncooled IR Imaging journal September 2009
Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators conference June 2009

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