Seed-mediated growth of patterned graphene nanoribbon arrays

Arnold, Michael Scott; Way, Austin James; Jacobberger, Robert Michael

Title: Seed-mediated growth of patterned graphene nanoribbon arrays

Patent · Tue Sep 12 00:00:00 EDT 2017

OSTI ID:1389825

Arnold, Michael Scott; Way, Austin James; Jacobberger, Robert Michael

Graphene nanoribbon arrays, methods of growing graphene nanoribbon arrays, and electronic and photonic devices incorporating the graphene nanoribbon arrays are provided. The graphene nanoribbons in the arrays are formed using a seed-mediated, bottom-up, chemical vapor deposition (CVD) technique in which the (001) facet of a semiconductor substrate and the orientation of the seed particles on the substrate are used to orient the graphene nanoribbon crystals preferentially along a single [110] direction of the substrate.

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Research Organization:: Wisconsin Alumni Research Foundation, Madison, WI (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: SC0006414

Assignee:: Wisconsin Alumni Research Foundation

Patent Number(s):: 9,761,669

Application Number:: 15/212,413

OSTI ID:: 1389825

Resource Relation:: Patent File Date: 2016 Jul 18

Country of Publication:: United States

Language:: English

References (38)

Oriented bottom-up growth of armchair graphene nanoribbons on germanium Arnold, Michael S.; Jacobberger, Robert Michael https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9287359 US Patent Document 9,287,359	patent	March 2016
Graphene-on-semiconductor substrates for analog electronics Lagally, Max G.; Cavallo, Francesca; Rojas-Delgado, Richard https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9324804 US Patent Document 9,324,804	patent	April 2016
Graphene-Based Transistor Anderson, Brent A.; Nowak, Edward J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100200840 US Patent Application 12/765483; 20100200840	patent-application	August 2010
Methods of Preparing a Graphene Sheet Wenxu, Xianyu; Ma, Dong-Joon; Lee, Jung-Hyun https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100255219 US Patent Application 12/656823; 20100255219	patent-application	October 2010
Self-Aligned Graphene Transistor Jenkins, Keith A.; Lin, Yu-Ming; Valdes-Garcia, Alberto https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110114919 US Patent Application 12/617770; 20110114919	patent-application	May 2011
Method of Manufacturing Graphene by Using Germanium Layer Lee, Eun-Kyung; Choi, Byoung-Lyong; Whang, Dong-Mok https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20110244662 US Patent Application 12/976874; 20110244662	patent-application	October 2011
Graphene Processing for Device and Sensor Applications Appleton, Bill R.; Gila, Brent P. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120003438 US Patent Application 13/202136; 20120003438	patent-application	January 2012
Transistor Having Graphene Base Kub, Francis J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120068157 US Patent Application 13/328728; 20120068157	patent-application	March 2012
Graphene Nanoribbons, Method of Fabrication and their Use in Electronic Devices Cohen, Guy; Dimitrakopoulos, Christos D.; Grill, Alfred https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120085991 US Patent Application 12/902620; 20120085991	patent-application	April 2012
Film on graphene on a substrate and method and devices therefor Kub, Francis; Anderson, Travis; Mastro, Michael https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120141799 US Patent Application 13/310347; 20120141799	patent-application	June 2012
Semiconductor Structure and Circuit Including Ordered Arrangement of Graphene Nanoribbons, and Methods of Forming Same Dimitrakopoulos, Christos D.; Grill, Alfred; McArdle, Timothy J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120181507 US Patent Application 13/009048; 20120181507	patent-application	July 2012
Structure and Method of Making Graphene Nanoribbons Dimitrakopoulos, Christos https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120261644 US Patent Application 13/088765; 20120261644	patent-application	October 2012
Broadband Absorptive Neutral Density Optical Filter Currie, Marc; Gaskill, David Kurt https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130027778 US Patent Application 13/558429; 20130027778	patent-application	January 2013
Direct Formation of Graphene on Semiconductor Substrates Seacrist, Michael R.; Berry, Vikas https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130099195 US Patent Application 13/652665; 20130099195	patent-application	April 2013
Homogeneous Multiple Band Gap Devices Liu, Feng; Zhang, Ye; Sun, Rujie https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130099205 US Patent Application 13/656565; 20130099205	patent-application	April 2013
Nanostructured Graphene with Atomically-Smooth Edges Arnold, Michael S.; Gopalan, Padma; Safron, Nathaniel S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130108839 US Patent Application 13/282666; 20130108839	patent-application	May 2013
Barrier Guided Growth of Microstructured and Nanostructured Graphene and Graphite Arnold, Michael S.; Gopalan, Padma; Safron, Nathaniel S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130160701 US Patent Application 13/592564; 20130160701	patent-application	June 2013
Channel-Last Methods for Making FETs Niyogi, Sandip; Barstow, Sean; Lang, Chi-I https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140264281 US Patent Application 14/137183; 20140264281	patent-application	September 2014
Low Voltage Photodetectors Na, Yun-Chung; Liu, Han-Din; Kang, Yimin https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20150037048 US Patent Application 14/129181; 20150037048	patent-application	February 2015
Wafer-Scale Growth of Single-Crystal Monolayer Graphene on Reusable Hydrogen-Terminated Germanium Lee, J.-H.; Lee, E. K.; Joo, W.-J. Science, Vol. 344, Issue 6181, p. 286-289 https://doi.org/10.1126/science.1252268	journal	April 2014
Direct Growth of Graphene Film on Germanium Substrate Wang, Gang; Zhang, Miao; Zhu, Yun Scientific Reports, Vol. 3, Issue 1 https://doi.org/10.1038%2Fsrep02465	journal	August 2013
Distinctly different thermal decomposition pathways of ultrathin oxide layer on Ge and Si surfaces Prabhakaran, K.; Maeda, F.; Watanabe, Y. Applied Physics Letters, Vol. 76, Issue 16, p. 2244-2246 https://doi.org/10.1063/1.126309	journal	April 2000
Mechanism of photo-stimulated processes in GeO_x films Nazarenkov, F. A.; Sterligov, V. A. Thin Solid Films, Vol. 254, Issue 1-2, p. 164-168 https://doi.org/10.1016/0040-6090(94)06264-L	journal	January 1995
(Invited) Novel Electronic and Optoelectronic Devices in Germanium Integrated on Silicon Saraswat, Krishna C. ECS Transactions, Vol. 33, Issue 6, p. 101-108 https://doi.org/10.1149/1.3487538	conference	January 2010
High performance germanium MOSFETs Saraswat, Krishna; Chui, Chi On; Krishnamohan, Tejas Materials Science and Engineering: B, Vol. 135, Issue 3, p. 242-249 https://doi.org/10.1016/j.mseb.2006.08.014	journal	December 2006
Material potential and scalability challenges of germanium CMOS Toriumi, A.; Lee, C. H.; Wang, S. K. 2011 IEEE International Electron Devices Meeting (IEDM), 2011 International Electron Devices Meeting https://doi.org/10.1109/IEDM.2011.6131631	conference	December 2011
Germanium MOSFET Devices: Advances in Materials Understanding, Process Development, and Electrical Performance Brunco, D. P.; De Jaeger, B.; Eneman, G. Journal of The Electrochemical Society, Vol. 155, Issue 7, p. H552-H561 https://doi.org/10.1149/1.2919115	journal	May 2008
Ambient stability of chemically passivated germanium interfaces Bodlaki, D.; Yamamoto, H.; Waldeck, D. H. Surface Science, Vol. 543, Issue 1-3, p. 63-74 https://doi.org/10.1016/S0039-6028(03)00958-0	journal	October 2003
Strained-Germanium Nanostructures for Infrared Photonics Boztug, Cicek; Sánchez-Pérez, José R.; Cavallo, Francesca ACS Nano, Vol. 8, Issue 4, p. 3136-3151 https://doi.org/10.1021/nn404739b	journal	March 2014
Electronic states of graphene nanoribbons studied with the Dirac equation Brey, L.; Fertig, H. A. Physical Review B, Vol. 73, Issue 23 https://doi.org/10.1103/PhysRevB.73.235411	journal	June 2006
Exploration of edge-dependent optical selection rules for graphene nanoribbons Chung, H. C.; Lee, M. H.; Chang, C. P. Optics Express, Vol. 19, Issue 23 https://doi.org/10.1364/OE.19.023350	journal	January 2011
Nanopatterning of graphene with crystallographic orientation control Biró, László P.; Lambin, Philippe Carbon, Vol. 48, Issue 10, p. 2677-2689 https://doi.org/10.1016/j.carbon.2010.04.013	journal	August 2010
Graphene nanoribbons with zigzag and armchair edges prepared by scanning tunneling microscope lithography on gold substrates Nemes-Incze, P.; Tapasztó, Levente; Magda, G. Zs. Applied Surface Science, Vol. 291, p. 48-52 https://doi.org/10.1016/j.apsusc.2013.11.012	journal	February 2014
Etching and narrowing of graphene from the edges Wang, Xinran; Dai, Hongjie Nature Chemistry, Vol. 2, Issue 8, p. 661-665 https://doi.org/10.1038/nchem.719	journal	June 2010
Controlling the Orientation, Edge Geometry, and Thickness of Chemical Vapor Deposition Graphene Murdock, Adrian T.; Koos, Antal; Britton, T. Ben ACS Nano, Vol. 7, Issue 2, p. 1351-1359 https://doi.org/10.1021/nn3049297	journal	January 2013
Growth of Single Crystal Graphene Arrays by Locally Controlling Nucleation on Polycrystalline Cu Using Chemical Vapor Deposition Wu, Wei; Jauregui, Luis A.; Su, Zhihua Advanced Materials, Vol. 23, Issue 42, p. 4898-4903 https://doi.org/10.1002/adma.201102456	journal	September 2011
Control and characterization of individual grains and grain boundaries in graphene grown by chemical vapour deposition Yu, Qingkai; Jauregui, Luis A.; Wu, Wei Nature Materials, Vol. 10, Issue 6, p. 443-449 https://doi.org/10.1038/nmat3010	journal	May 2011
Direct oriented growth of armchair graphene nanoribbons on germanium Jacobberger, Robert M.; Kiraly, Brian; Fortin-Deschenes, Matthieu Nature Communications, Vol. 6, Article No. 8006 https://doi.org/10.1038/ncomms9006	journal	August 2015

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