Single crystal micromechanical resonator and fabrication methods thereof
Patent
·
OSTI ID:1336915
The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- 9,525,398
- Application Number:
- 14/288,236
- OSTI ID:
- 1336915
- Resource Relation:
- Patent File Date: 2014 May 27
- Country of Publication:
- United States
- Language:
- English
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