EUV/X-ray Multilayer Optics: Meeting the Challenges of Next-Generation Applications
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC52-07NA27344
- OSTI ID:
- 1258544
- Report Number(s):
- LLNL-PROC-692848
- Resource Relation:
- Conference: Presented at: CLEO 2016, San Jose, CA, United States, Jun 05 - Jun 10, 2016
- Country of Publication:
- United States
- Language:
- English
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