Silicon-based visible and near-infrared optoelectric devices

Mazur, Eric; Carey, James Edward

Title: Silicon-based visible and near-infrared optoelectric devices

Patent · Tue Mar 01 00:00:00 EST 2016

OSTI ID:1240625

Mazur, Eric; Carey, James Edward

In one aspect, the present invention provides a silicon photodetector having a surface layer that is doped with sulfur inclusions with an average concentration in a range of about 0.5 atom percent to about 1.5 atom percent. The surface layer forms a diode junction with an underlying portion of the substrate. A plurality of electrical contacts allow application of a reverse bias voltage to the junction in order to facilitate generation of an electrical signal, e.g., a photocurrent, in response to irradiation of the surface layer. The photodetector exhibits a responsivity greater than about 1 A/W for incident wavelengths in a range of about 250 nm to about 1050 nm, and a responsivity greater than about 0.1 A/W for longer wavelengths, e.g., up to about 3.5 microns.

View Patent

Cite

Export

Save

Research Organization:: Harvard Univ., Cambridge, MA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FC36-01GO11051

Assignee:: President And Fellows Of Harvard College (Cambridge, MA)

Patent Number(s):: 9,276,143

Application Number:: 14/100,954

OSTI ID:: 1240625

Resource Relation:: Patent File Date: 2013 Dec 09

Country of Publication:: United States

Language:: English

References (73)

Modeling of the spectral response of PIN photodetectors Impact of exposed zone thickness, surface recombination velocity and trap concentration Bouhdada, A.; Marrakh, R.; Vigué, F. Microelectronics Reliability, Vol. 44, Issue 2, p. 223-228 https://doi.org/10.1016/S0026-2714(03)00221-X	journal	February 2004
Femtosecond laser-assisted microstructuring of silicon for novel detector, sensing and display technologies Carey, J. E.; Mazur, E. LEOS 2002. 2002 IEEE/LEOS Annual Meeting Conference. 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society, The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society https://doi.org/10.1109/LEOS.2002.1133936	conference	January 2002
Femtosecond laser-assisted microstructuring of silicon for novel detector, sensing and display technologies Carey, J. E.; Mazur, E. 2003 IEEE LEOS Annual Meeting Conference Proceedings, The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2003. LEOS 2003. https://doi.org/10.1109/LEOS.2003.1252883	conference	January 2003
Fabrication of micrometer-sized conical field emitters using femtosecond laser-assisted etching of silicon Carey, J. E.; Crouch, C. H.; Younkin, R. IVMC 2001. Proceedings of the 14th International Vacuum Microelectronics Conference (Cat. No.01TH8586) https://doi.org/10.1109/IVMC.2001.939660	conference	January 2001
Field emission from silicon microstructures formed by femtosecond laser assisted etching Carey, J. E.; Zhao, L.; Wu, C. CLEO 2001. Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Technical Digest, Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Technical Digest (IEEE Cat. No.01CH37170) https://doi.org/10.1109/CLEO.2001.948159	conference	January 2001
Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon Crouch, C. H.; Carey, J. E.; Warrender, J. M. Applied Physics Letters, Vol. 84, Issue 11, p. 1850-1852 https://doi.org/10.1063/1.1667004	journal	March 2004
Infrared absorption by sulfur-doped silicon formed by femtosecond laser irradiation Crouch, C. H.; Carey, J. E.; Shen, M. Applied Physics A, Vol. 79, Issue 7 https://doi.org/10.1007/s00339-004-2676-0	journal	November 2004
Formation of conical microstructures upon laser evaporation of solids Dolgaev, S. I.; Lavrishev, S. V.; Lyalin, A. A. Applied Physics A Materials Science & Processing, Vol. 73, Issue 2 https://doi.org/10.1007/s003390100530	journal	August 2001
Surface microstructuring and long-range ordering of silicon nanoparticles Fowlkes, J. D.; Pedraza, A. J.; Blom, D. A. Applied Physics Letters, Vol. 80, Issue 20, p. 3799-3801 https://doi.org/10.1063/1.1480106	journal	May 2002
Femtosecond laser-induced formation of spikes on silicon Her, T. -H.; Finlay, R. J.; Wu, C. Applied Physics A: Materials Science & Processing, Vol. 70, Issue 4 https://doi.org/10.1007/s003390051052	journal	April 2000
Microstructuring of silicon with femtosecond laser pulses Her, Tsing-Hua; Finlay, Richard J.; Wu, Claudia Applied Physics Letters, Vol. 73, Issue 12, p. 1673-1675 https://doi.org/10.1063/1.122241	journal	September 1998
Novel conical microstructures created in silicon with femtosecond laser pulses Technical Digest Summaries of papers presented at the Conference on Lasers and Electro-Optics Conference Edition. 1998 Technical Digest Series, Vol.6, Technical Digest. Summaries of Papers Presented at the Conference on Lasers and Electro-Optics. Conference Edition. 1998 Technical Digest Series, Vol.6 (IEEE Cat. No.98CH36178) https://doi.org/10.1109/CLEO.1998.676564	conference	January 1998
Silicon microcolumn arrays grown by nanosecond pulsed-excimer laser irradiation Pedraza, A. J.; Fowlkes, J. D.; Lowndes, D. H. Applied Physics Letters, Vol. 74, Issue 16, p. 2322-2324 https://doi.org/10.1063/1.123838	journal	April 1999
Surface nanostructuring of silicon Pedraza, A. J.; Fowlkes, J. D.; Guan, Y. -F. Applied Physics A, Vol. 77, Issue 2 https://doi.org/10.1007/s00339-003-2113-9	journal	July 2003
Dynamics of the hydrodynamical growth of columns on silicon exposed to ArF excimer-laser irradiation Sánchez, F.; Morenza, J. L.; Aguiar, R. Applied Physics A: Materials Science & Processing, Vol. 66, Issue 1 https://doi.org/10.1007/s003390050641	journal	January 1998
Whiskerlike structure growth on silicon exposed to ArF excimer laser irradiation Sánchez, F.; Morenza, J. L.; Aguiar, R. Applied Physics Letters, Vol. 69, Issue 5, p. 620-622 https://doi.org/10.1063/1.117926	journal	July 1996
Temperature dependence of photoluminescence in noncrystalline silicon Serpenguzel, Ali; Bilici, Temel; Inanc, Ibrahim Integrated Optoelectronic Devices 2004: Proceedings Volume 5349, Physics and Simulation of Optoelectronic Devices XII, Vol. 5349 https://doi.org/10.1117/12.529549	conference	June 2004
Formation of regular arrays of silicon microspikes by femtosecond laser irradiation through a mask Shen, M. Y.; Crouch, C. H.; Carey, J. E. Applied Physics Letters, Vol. 82, Issue 11, p. 1715-1717 https://doi.org/10.1063/1.1561162	journal	March 2003
Near-unity below-band-gap absorption by microstructured silicon Wu, C.; Crouch, C. H.; Zhao, L. Applied Physics Letters, Vol. 78, Issue 13, p. 1850-1852 https://doi.org/10.1063/1.1358846	journal	March 2001
Visible luminescence from silicon surfaces microstructured in air Wu, C.; Crouch, C. H.; Zhao, L. Applied Physics Letters, Vol. 81, Issue 11, p. 1999-2001 https://doi.org/10.1063/1.1504868	journal	September 2002
Method for making defect-free zone by laser-annealing of doped silicon Narayan, Jagdish; White, Clark W.; Young, Rosa https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4181538 US Patent Document 4,181,538	patent	January 1980
Rigid electro-optic device using a transparent ferroelectric ceramic element Trapani, Giorgio https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4201450 US Patent Document 4,201,450	patent	May 1980
Photodiode having enhanced long wavelength response Webb, Patrick https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4277793 US Patent Document 4,277,793	patent	July 1981
Integrated optical device having integral photodetector Glass, Alastair M.; Johnson, Anthony Mitchell https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4703996 US Patent Document 4,703,996	patent	November 1987
Large area, low voltage, high current photovoltaic modules and method of fabricating same Nath, Prem; Laarman, Timothy D.; Vogeli, Craig https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4773944 US Patent Document 4,773,944	patent	September 1988
Controlled reflectance solar cell Dill, Hans G.; Lillington, David R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4838952 US Patent Document 4,838,952	patent	June 1989
Method and apparatus for bistable optical information storage for erasable optical disks Land, Cecil E.; McKinney, Ira D. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4965784 US Patent Document 4,965,784	patent	October 1990
Semiconductor laser manufacturing method Shima, Akihiro; Isshiki, Kunihiko https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5089437 US Patent Document 5,089,437	patent	February 1992
Ceramic, metal and composite materials having increased surface area Singh, Rajiv; Moudgil, Brij M.; Behl, Sanjay https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5635089 US Patent Document 5,635,089	patent	June 1997
Fabrication of polycrystalline thin films by pulsed laser processing Mitlitsky, Fred; Truher, Joel; Kaschmitter, James L. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5714404 US Patent Document 5,714,404	patent	February 1998
Rotary position sensor with reference and grey scales Osajda, Marc; Delpoux, Arnaud https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5773820 US Patent Document 5,773,820	patent	June 1998
Overload prevention in a telecommunication network node Ginzboorg, Philip https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5898672 US Patent Document 5,898,672	patent	April 1999
Client-server architecture using internet and public switched networks Civanlar, Mehmet Reha; Haskell, Barin Geoffry https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5995606 US Patent Document 5,995,606	patent	November 1999
Micro-texture media made by polishing of a selectively irradiated surface Wong, Javier; Lin, Li-Ju; Iams, Douglas Allan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6117499 US Patent Document 6,117,499	patent	September 2000
Laser curing of spin-on dielectric thin films Chua, Chee Tee; Lee, Yuan-Ping; Zhou, Mei Sheng https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6121130 US Patent Document 6,121,130	patent	September 2000
Intelligent data peripheral systems and methods Smyk, Darek A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6128379 US Patent Document 6,128,379	patent	October 2000
Laser annealing method and laser annealing device Kusumoto, Naoto; Yamazaki, Shunpei; Tanaka, Koichiro https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6242291 US Patent Document 6,242,291	patent	June 2001
Apparatus for treating an object using ultra-violet light Danese, Michael J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6272768 US Patent Document 6,272,768	patent	August 2001
II-VI semiconductor component having at least one junction between a layer containing Se and a layer containing BeTe, and process for producing the junction Fischer, Frank; Waag, Andreas; Baron, Thierry https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6372536 US Patent Document 6,372,536	patent	April 2002
Method for treating an object using ultra-violet light Danese, Michael J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6457478 US Patent Document 6,457,478	patent	October 2002
Method of forming polycrystalline semiconductor film Fujimura, Takashi; Kawamura, Shinichi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6486046 US Patent Document 6,486,046	patent	November 2002
Method and apparatus for manufacturing semiconductor element Obara, Takashi; Nozaki, Hideki; Kobayashi, Motoshige https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6562705 US Patent Document 6,562,705	patent	May 2003
Surface finishes on laser rods and slabs for laser peening systems Sokol, David; Dulaney, Jeff L.; Toller, Steven M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6756104 US Patent Document 6,756,104	patent	June 2004
System and method for glass processing and temperature sensing Shepard, Chester L.; Cannon, Bret D.; Khaleel, Mohamed Akasha M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6796144 US Patent Document 6,796,144	patent	September 2004
Semiconductor light-emitting device, method of manufacturing transparent conductor film and method of manufacturing compound semiconductor light-emitting device Nakamura, Takao; Matsubara, Hideki https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6876003 US Patent Document 6,876,003	patent	April 2005
Silicon-based visible and near-infrared optoelectric devices Carey, James E.; Mazur, Eric https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7057256 US Patent Document 7,057,256	patent	June 2006
Passivation of material using ultra-fast pulsed laser Railkar, Tarak A.; Malshe, Ajay P.; Brown, William D. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7112545 US Patent Document 7,112,545	patent	September 2006
Laser assisted direct imprint lithography Chou, Stephen Y. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7211214 US Patent Document 7,211,214	patent	May 2007
Systems and methods for light absorption and field emission using microstructured silicon Mazur, Eric; Carey, James E.; Crouch, Catherine H. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7390689 US Patent Document 7,390,689	patent	June 2008
Method and apparatus for desorption and ionization of analytes Hutchens, T. William; Yip, Tai-Tung https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7413909 US Patent Document 7,413,909	patent	August 2008
Semiconductor structure processing using multiple laser beam spots spaced on-axis with cross-axis offset Bruland, Kelly J.; Baird, Brian W.; Lo, Ho Wai https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7425471 US Patent Document 7,425,471	patent	September 2008
Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate Mazur, Eric; Shen, Mengyan https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7442629 US Patent Document 7,442,629	patent	October 2008
Silicon-based visible and near-infrared optoelectric devices Mazur, Eric; Carey, James E. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7504702 US Patent Document 7,504,702	patent	March 2009
Selective laser annealing of semiconductor material Kizilyalli, Isik C.; Radosevich, Joseph R.; Roy, Pradip K. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7605064 US Patent Document 7,605,064	patent	October 2009
Semiconductor structure processing using multiple laterally spaced laser beam spots with joint velocity profiling Bruland, Kelly J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7629234 US Patent Document 7,629,234	patent	December 2009
Semiconductor structure processing using multiple laterally spaced laser beam spots delivering multiple blows Bruland, Kelly J.; Baird, Brian W.; Lo, Ho Wai https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7687740 US Patent Document 7,687,740	patent	March 2010
Semiconductor structure processing using multiple laser beam spots spaced on-axis on non-adjacent structures Bruland, Kelly J.; Baird, Brian W.; Lo, Ho Wai https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7935941 US Patent Document 7,935,941	patent	May 2011
Cathode structure for field emission device and method of fabricating the same Cho, Young-Rae; Lee, Jin-Ho; Song, Yoon-Ho https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20010044251 US Patent Application 09/860397; 20010044251	patent-application	November 2001
Method of forming polycrystalline semiconductor film Fujimura, Takashi; Kawamura, Shinichi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020034845 US Patent Application 09/954152; 20020034845	patent-application	March 2002
Production method and device for hologram Hosono, Hideo; Hirano, Masahiro; Sarukura, Nobuhiko https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020126333 US Patent Application 09/890274; 20020126333	patent-application	September 2002
Chirp compensation method and apparatus Albrecht, Hans-Stephan; Kramer, Matthias; Serwazi, Marcus https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030016708 US Patent Application 10/165766; 20030016708	patent-application	January 2003
System and method for glass processing and temperature sensing Shepard, Chester L.; Cannon, Bret D.; Khaleel, Mohammad A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030024269 US Patent Application 09/870332; 20030024269	patent-application	February 2003
Laser processing method, method for forming a flash memory, insulated gate semiconductor device and method for forming the same Yamazaki, Shunpei; Takemura, Yasuhiko https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030025156 US Patent Application 10/199514; 20030025156	patent-application	February 2003
Systems and methods for light absorption and field emission using microstructured silicon Mazur, Eric; Carey III, James Edward; Crouch, Catherine H.; https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030029495 US Patent Application 10/155429; 20030029495	patent-application	February 2003
Light emitting diode and semiconductor laser Hosono, Hideo; Ota, Hiromichi; Orita, Masahiro https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030132449 US Patent Application 10/169767; 20030132449	patent-application	July 2003
Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method Im, James S.; Sposili, Robert S.; Crowder, Mark A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050032249 US Patent Application 10/939271; 20050032249	patent-application	February 2005
Silicon-based visible and near-infrared optoelectric devices Mazur, Eric; Carey, III, James E. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050127401 US Patent Application 10/950230; 20050127401	patent-application	June 2005
Method of forming silicon-based thin film, silicon-based thin film, and photovoltaic element Kondo, Takaharu; Okabe, Shotaro; Moriyama, Koichiro https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050227457 US Patent Application 10/101859; 20050227457	patent-application	October 2005
Systems and methods for creating crystallographic-orientation controlled poly-Silicon films Im, James S.; van der Wilt, Paul Christian https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060102901 US Patent Application 10/994205; 20060102901	patent-application	May 2006
P-Type Group II-VI Semiconductor Compounds Burgener, II, Robert H.; Felix, Roger L.; Renlund, Gary M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070102709 US Patent Application 11/620325; 20070102709	patent-application	May 2007
Solar Cell and Its Spectrum Convertor Naum, Soshchin; Lo, Wei-Hung; Tsai, Chi-Ruei https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090151785 US Patent Application 12/241493; 20090151785	patent-application	June 2009
Method for the Preparation of Group IB-IIIA-VIA Quaternary or Higher Alloy Semiconductor Films Alberts, Vivian https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100190292 US Patent Application 12/728054; 20100190292	patent-application	July 2010
Glass-Based SOI Structures Couillard, James G.; Gadkaree, Kishor P.; Mach, Joseph F. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100213582 US Patent Application 12/328030; 20100213582	patent-application	August 2010

Similar Records

Silicon-based visible and near-infrared optoelectric devices

Patent · Tue Oct 17 00:00:00 EDT 2017 · OSTI ID:1240625

Mazur, Eric; Carey, James Edward

Silicon-based visible and near-infrared optoelectric devices

Patent · Tue Dec 20 00:00:00 EST 2011 · OSTI ID:1240625

Mazur, Eric

Silicon-based visible and near-infrared optoelectric devices

Patent · Tue Mar 17 00:00:00 EDT 2009 · OSTI ID:1240625

Mazur, Eric

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
36 MATERIALS SCIENCE

Title: Silicon-based visible and near-infrared optoelectric devices

Citation Formats

References (73)

Similar Records

Related Subjects