MEMS closed-loop control incorporating a memristor as feedback sensing element
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Univ. of Texas, El Paso, TX (United States)
- Univ. Autonoma de Ciudad Juarez (Mexico)
In this work the integration of a memristor with a MEMS parallel plate capacitor coupled by an amplification stage is simulated. It is shown that the MEMS upper plate position can be controlled up to 95% of the total gap. Due to its common operation principle, the change in the MEMS plate position can be interpreted by the change in the memristor resistance, or memristance. A memristance modulation of ~1 KΩ was observed. A polynomial expression representing the MEMS upper plate displacement as a function of the memristance is presented. Thereafter a simple design for a voltage closed-loop control is presented showing that the MEMS upper plate can be stabilized up to 95% of the total gap using the memristor as a feedback sensing element. As a result, the memristor can play important dual roles in overcoming the limited operation range of MEMS parallel plate capacitors and in simplifying read-out circuits of those devices by representing the motion of the upper plate in the form of resistance change instead of capacitance change.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- Grant/Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1238652
- Report Number(s):
- SAND-2015-8424J; 607298
- Journal Information:
- IEEE Transactions on Circuits and Systems. II, Express Briefs, Vol. 63, Issue 3; ISSN 1549-7747
- Publisher:
- IEEECopyright Statement
- Country of Publication:
- United States
- Language:
- English
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