Microwave ion source

Patent · Tue Jul 26 00:00:00 EDT 2005

OSTI ID:1175442

Leung, Ka-Ngo; Reijonen, Jani; Thomae, Rainer W.

A compact microwave ion source has a permanent magnet dipole field, a microwave launcher, and an extractor parallel to the source axis. The dipole field is in the form of a ring. The microwaves are launched from the middle of the dipole ring using a coaxial waveguide. Electrons are heated using ECR in the magnetic field. The ions are extracted from the side of the source from the middle of the dipole perpendicular to the source axis. The plasma density can be increased by boosting the microwave ion source by the addition of an RF antenna. Higher charge states can be achieved by increasing the microwave frequency. A xenon source with a magnetic pinch can be used to produce intense EUV radiation.

• Research Organization: Univ. of California, Oakland, CA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC03-76SF00098
• Assignee: The Regents of the University of California (Oakland, CA)
• Patent Number(s): 6,922,019
• Application Number: 10/150,534
• OSTI ID: 1175442
• Country of Publication: United States
• Language: English

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