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Title: Poole-frenkel piezoconductive element and sensor

Patent ·
OSTI ID:1174970

A new class of highly sensitive piezoconductive strain sensor elements and sensors has been invented. The new elements function under conditions such that electrical conductivity is dominated by Poole-Frenkel transport. A substantial piezoconductive effect appears in this regime, allowing the new sensors to exhibit sensitivity to applied strain as much as two orders of magnitude in excess of prior art sensors based on doped silicon.

Research Organization:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
6,771,083
Application Number:
10/101,450
OSTI ID:
1174970
Country of Publication:
United States
Language:
English

References (1)

Characterization of tantalum oxynitride thin films as high-temperature strain gauges journal January 1995

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