Remote control of a scanning electron microscope aperture and gun alignment
Patent
·
OSTI ID:1174528
This invention relates to a remote control system which through gear motors coupled to the scanning electron microscope (SEM) manual control knobs readily permits remote adjustments as necessary.
- Research Organization:
- US Department of Energy (USDOE), Washington, DC (United States)
- Sponsoring Organization:
- USDOE
- Assignee:
- United States Of America, Department Of Energy
- Patent Number(s):
- 6,630,668
- OSTI ID:
- 1174528
- Country of Publication:
- United States
- Language:
- English
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