Replication of patterned thin-film structures for use in plasmonics and metamaterials
Patent
·
OSTI ID:1169060
The present invention provides templating methods for replicating patterned metal films from a template substrate such as for use in plasmonic devices and metamaterials. Advantageously, the template substrate is reusable and can provide plural copies of the structure of the template substrate. Because high-quality substrates that are inherently smooth and flat are available, patterned metal films in accordance with the present invention can advantageously provide surfaces that replicate the surface characteristics of the template substrate both in the patterned regions and in the unpatterned regions.
- Research Organization:
- Univ. of Minnesota, Minneapolis, MN (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- FG02-06ER46438
- Assignee:
- Regents of the University of Minnesota (St. Paul, MN)
- Patent Number(s):
- 8,948,562
- Application Number:
- 13/131,197
- OSTI ID:
- 1169060
- Country of Publication:
- United States
- Language:
- English
Replication of patterned thin-film structures for use in plasmonics and metamaterials
|
patent | February 2015 |
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