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Title: Leakage current reduction via scallop-free Bosch process for high aspect ratio Si p-i-n diodes

Journal Article · · IEEE Electronic Device Letters, vol. 34, no. 10, October 1, 2013, pp. 1226-1228
OSTI ID:1113358

Research Organization:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
1113358
Report Number(s):
LLNL-JRNL-639056
Journal Information:
IEEE Electronic Device Letters, vol. 34, no. 10, October 1, 2013, pp. 1226-1228, Journal Name: IEEE Electronic Device Letters, vol. 34, no. 10, October 1, 2013, pp. 1226-1228
Country of Publication:
United States
Language:
English

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