Electrical and structural properties of ZnO synthesized via infiltration of lithographically defined polymer templates

Stein, Aaron; Kisslinger, Kim; Black, Charles T.

doi:10.1063/1.4935793

Title: Electrical and structural properties of ZnO synthesized via infiltration of lithographically defined polymer templates

Journal Article · Tue Nov 17 00:00:00 EST 2015 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4935793· OSTI ID:1236555

Stein, Aaron ^[1]; Kisslinger, Kim ^[1]; Black, Charles T. ^[1]

Brookhaven National Lab. (BNL), Upton, NY (United States)

We investigate the electrical and structural properties of infiltration-synthesized ZnO. In-plane ZnO nanowire arrays with prescribed positional registrations are generated by infiltrating diethlyzinc and water vapor into lithographically defined SU-8 polymer templates and removing organic matrix by oxygen plasma ashing. Transmission electron microscopy reveals that homogeneously amorphous as-infiltrated polymer templates transform into highly nanocrystalline ZnO upon removal of organic matrix. Field-effect transistor device measurements show that the synthesized ZnO after thermal annealing displays a typical n-type behavior, ~1019 cm^-3 carrier density, and ~0.1 cm² V^-1 s^-1 electron mobility, reflecting highly nanocrystalline internal structure. The results demonstrate the potential application of infiltration synthesis in fabricating metal oxide electronic devices.

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Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC00112704; SC0012704

OSTI ID:: 1236555

Alternate ID(s):: OSTI ID: 1226190

Report Number(s):: BNL-111764-2016-JA; R&D Project: 16065/16074; KC0403020

Journal Information:: Applied Physics Letters, Vol. 107, Issue 20; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 28 works

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Cited By (4)

The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective Waldman, Ruben Z.; Mandia, David J.; Yanguas-Gil, Angel The Journal of Chemical Physics, Vol. 151, Issue 19 https://doi.org/10.1063/1.5128108	journal	November 2019
Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition Subramanian, Ashwanth; Tiwale, Nikhil; Nam, Chang-Yong JOM, Vol. 71, Issue 1 https://doi.org/10.1007/s11837-018-3141-4	journal	September 2018
Multifunctional UV and Gas Sensors Based on Vertically Nanostructured Zinc Oxide: Volume Versus Surface Effect Ocola, Leonidas E.; Wang, Yale; Divan, Ralu Sensors, Vol. 19, Issue 9 https://doi.org/10.3390/s19092061	journal	May 2019
Nano Spray‐Dried Block Copolymer Nanoparticles and Their Transformation into Hybrid and Inorganic Nanoparticles Weisbord, Inbal; Shomrat, Neta; Moshe, Hen Advanced Functional Materials, Vol. 30, Issue 18 https://doi.org/10.1002/adfm.201808932	journal	March 2019

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