Preliminary survey report: control technology for gallium arsenide processing at Microwave Semiconductor Corporation, Somerset, New Jersey
The technology available to control hazardous substances in gallium arsenide applications is reviewed and evaluated in light of findings from a visit to the Microwave Semiconductor Corporation in Somerset, New Jersey. The facility has 500 employees, 64 in the gallium arsenide technical staff. Direct ion implantation or epitaxial growth, photolithography, plasma etching, and backside wafer processing are used at the facility to fabricate a gallium-arsenide wafer. Hazards exist primarily in the numerous solvents, acids, and gases employed in wafer production. These include chlorobenzene, methanol, methyl-ethyl-ketone, methyl-isobutyl-ketone, ammonia, and silane. The use of arsine gas will soon begin at the facility, which will also be hazardous to employees due to its extremely toxic properties. An environmental engineer tests for 70 hazardous chemicals in the work area, including hydrogen-fluoride, cyanide, phosgene, ammonia, formaldehyde, arsine, and phenol. The authors recommend the establishment of a program for air sampling to monitor arsenic levels and wipe sampling for arsenic surface contamination.
- Research Organization:
- National Inst. for Occupational Safety and Health, Cincinnati, OH (USA)
- OSTI ID:
- 6334357
- Report Number(s):
- PB-87-183596/XAB; ECTB-163-11A
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
99 GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE
ARSENIC COMPOUNDS
INDOOR AIR POLLUTION
GALLIUM ARSENIDES
MANUFACTURING
HAZARDOUS MATERIALS
OCCUPATIONAL SAFETY
SEMICONDUCTOR MATERIALS
AMMONIA
INDUSTRIAL MEDICINE
INSPECTION
METHYL ISOBUTYL KETONE
MONITORS
SAMPLING
TOXICITY
AIR POLLUTION
ARSENIDES
GALLIUM COMPOUNDS
HYDRIDES
HYDROGEN COMPOUNDS
KETONES
MATERIALS
MEASURING INSTRUMENTS
MEDICINE
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
ORGANIC COMPOUNDS
PNICTIDES
POLLUTION
SAFETY
500200* - Environment
Atmospheric- Chemicals Monitoring & Transport- (-1989)
552000 - Public Health