Large area surface treatment by ion beam technology
- K Systems Corp., Beavercreek, OH (United States)
An ultra high vacuum ion beam system, consisting of a 20 cm diameter Rf excited (13.56 MHz) ion gun and a four-axis substrate scanner, has been used to modify large surfaces (up to 1,000 cm{sup 2}) of various materials, including: infrared windows, silicon nitride, polycrystalline diamond, 304 and 316 stainless steels, 440 C and M50 steels, aluminum alloys, and polycarbonates; by depositing different chemical compositions of diamond-like carbon films. The influences of ion energy, Rf power, gas composition (H{sub 2}/CH{sub 4}, Ar/CH{sub 4} and O{sub 2}/CH{sub 4}/H{sub 2}), on the diamond-like carbon characteristics has been studied. Particular attention was focused on adhesion, environmental effects, IR(3--12 {micro}m) transmission, coefficient of friction, and wear factors under spacelike environments of diamond-like carbon films on various substrates. A quadrupole mass spectrometer was utilized to monitor the ion beam composition for quality control and process optimization.
- OSTI ID:
- 549814
- Report Number(s):
- CONF-961202-; ISBN 1-55899-342-8; TRN: IM9752%%37
- Resource Relation:
- Conference: 1996 Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 2-6 Dec 1996; Other Information: PBD: 1997; Related Information: Is Part Of Materials modification and synthesis by ion beam processing; Alexander, D.E. [ed.] [Argonne National Lab., IL (United States)]; Cheung, N.W. [ed.] [Univ. of California, Berkeley, CA (United States)]; Park, B. [ed.] [Georgia Inst. of Tech., Atlanta, GA (United States)]; Skorupa, W. [ed.] [Research Center Rossendorf, Inc., Dresden (Germany)]; PB: 748 p.; Materials Research Society symposium proceedings, Volume 438
- Country of Publication:
- United States
- Language:
- English
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