Silicon-containing diamond like-carbon coatings formed by ion beam assisted deposition (IBAD): Processing and properties of a new category of hard, wear resistant thin films
- Univ. of Connecticut, Storrs, CT (United States); and others
Amorphous silicon-containing diamond like-carbon Si-DLQ coatings were formed by thermal evaporation of a tetraphenyl-tetramethyl-trisiloxane ((C{sub 6}H{sub 5}){sub 4}(CH{sub 3}){sub 4}Si{sub 3}O{sub 2}) diffusion pump oil (Dow Corning 704) onto silicon and steel substrates with simultaneous bombardment of the growing film with 40 keV Ar{sup +} ions to decompose the (C{sub 6}H{sub 5}){sub 4}(CH{sub 3}){sub 4}Si{sub 3}O{sub 2} molecules. Both the current density of the ion beam and the oil arrival rate were varied to produce hard, adhesive films on room temperature substrates, with densities ranging from 1.4 to 2.3 g/cm{sup 3} and Knoop microhardness values (at 15 g load) from 1000 to 2100 MPa.
- OSTI ID:
- 230180
- Report Number(s):
- CONF-950840--
- Country of Publication:
- United States
- Language:
- English
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