5-{mu}m-wide YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} coplanar line with low transmission loss
- Fundamental Research Laboratories, NEC Corporation, Tsukuba, Ibaraki 305 (Japan)
Narrow and low-loss YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} (YBCO) transmission lines for use in multichip modules have been attempted to be developed. 18-cm-long YBCO coplanar transmission lines with widths down to 5 {mu}m were prepared by a composite patterning process combining Ar-ion milling and wet-etching. The transmission losses of the packaged 5-, 10-, and 25-{mu}m-wide lines, respectively, were {minus}1.57, {minus}0.85, and {minus}0.55 dB at 20 GHz and 55 K. These values provide similar surface resistances of 0.59{endash}0.80 m{Omega} at 20 GHz and 55 K. This indicates successful fabrication of a 5-{mu}m-wide YBCO coplanar line without notable extrinsic loss increase resulting from process damage. The attenuation constants of these lines are approximately two orders of magnitude lower than for 10-{mu}m-wide Cu microstrip lines. These results show that the YBCO coplanar lines with widths down to 5 {mu}m have great potential for use in multi-chip modules. {copyright} {ital 1997 American Institute of Physics.}
- OSTI ID:
- 529999
- Journal Information:
- Applied Physics Letters, Vol. 70, Issue 25; Other Information: PBD: Jun 1997
- Country of Publication:
- United States
- Language:
- English
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