Synthesis of mullite coatings by chemical vapor deposition
- Department of Manufacturing Engineering, Boston University, Boston, Massachusetts 02215 (United States)
Formation of mullite on ceramic substrates via chemical vapor deposition was investigated. Mullite is a solid solution of Al{sub 2}O{sub 3} and SiO{sub 2} with a composition of 3Al{sub 2}O{sub 3}{center_dot}2SiO{sub 2}. Thermodynamic calculations performed on the AlCl{sub 3}{endash}SiCl{sub 4}{endash}CO{sub 2}{endash}H{sub 2} system were used to construct equilibrium chemical vapor deposition (CVD) phase diagrams. With the aid of these diagrams and consideration of kinetic rate limiting factors, initial process parameters were determined. Through process optimization, crystalline CVD mullite coatings have been successfully grown on SiC and Si{sub 3}N{sub 4} substrates. Results from the thermodynamic analysis, process optimization, and effect of various process parameters on deposition rate and coating morphology are discussed. {copyright} {ital 1996 Materials Research Society.}
- OSTI ID:
- 285858
- Journal Information:
- Journal of Materials Research, Vol. 11, Issue 6; Other Information: PBD: Jun 1996
- Country of Publication:
- United States
- Language:
- English
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