New leak assembly based on fluidic nanochannels
- School of Mechanical and Automobile Engineering, Hefei University of Technology, Hefei 230031 (China)
- National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029 (China)
- Shanghai Institute of Spacecraft Equipment, Shanghai 201100 (China)
Fluidic nanochannels with a characteristic dimension of ∼280 nm were fabricated and designed as a leak assembly, where the nanochannels were formed on silicon wafers and enclosed with Pyrex{sup ®} glass. The geometric dimensions were characterized by scanning electron microscopy, and the gas flow conductance of He and other heavy gases (N{sub 2}, O{sub 2}, and Ar) was measured, and its uncertainty estimated, by the difference method. The results indicated that the measured flow conductance values were 45% less than the calculated flow conductance values. For helium, molecular flow was shown to occur at pressures ranging from vacuum to atmospheric pressure. As a consequence of the well-defined geometry, the prediction of flow conductance could be achieved for various gas species.
- OSTI ID:
- 22592848
- Journal Information:
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Vol. 34, Issue 5; Other Information: (c) 2016 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 0734-2101
- Country of Publication:
- United States
- Language:
- English
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