Fabrication of fluidic devices with 30 nm nanochannels by direct imprinting

Fernandez-Cuesta, Irene; Laura Palmarelli, Anna; Liang, Xiaogan; Zhang, Jingyu; Dhuey, Scott; Olynick, Deirdre; Cabrini, Stefano

doi:10.1116/1.3662886

Title: Fabrication of fluidic devices with 30 nm nanochannels by direct imprinting

Journal Article · Wed Nov 23 00:00:00 EST 2011 · Journal of Vacuum Science and Technology B

DOI:https://doi.org/10.1116/1.3662886· OSTI ID:1511326

Fernandez-Cuesta, Irene ^[1]; Laura Palmarelli, Anna ^[2]; Liang, Xiaogan ^[3]; Zhang, Jingyu ^[3]; Dhuey, Scott ^[3]; Olynick, Deirdre ^[3]; Cabrini, Stefano ^[3]

Danmarks Tekniske Univ., Lyngby (Denmark); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). The Molecular Foundry
Politecnico di Torino (Italy); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). The Molecular Foundry
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). The Molecular Foundry

In this work, we propose an innovative approach to the fabrication of a complete micro/nano fluidic system, based on direct nanoimprint lithography. The fabricated device consists of nanochannels connected to U-shaped microchannels by triangular tapered inlets, and has four large reservoirs for liquid input. A master silicon stamp with the multilevel structures is fabricated first, and then a negative replica is made, to be used as a stamp for ultraviolet nanoimprint lithography (UV-NIL). Afterwards, just one single UV-NIL step is necessary for patterning all the the micro and nanostructures. Furthermore, the devices are made of all-transparent materials, and the method allows flexibility for the type of substrates used. The active material (an inorganic-organic hybrid polymer) used for the fabrication of the device has been carefully chosen, so it has adequate surface properties (inert and hydrophilic) for its direct use for biological applications. Devices having 30 nm wide, 30 nm deep nanochannels have been fabricated, and the successful performance of the fluidic system and the continuity of the nanochannels have been proven by flow tests.

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Research Organization:: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22), Scientific User Facilities Division (SC-22.3 )

DOE Contract Number:: AC02-05CH11231

OSTI ID:: 1511326

Journal Information:: Journal of Vacuum Science and Technology B, Vol. 29, Issue 6; ISSN 2166-2746

Publisher:: American Vacuum Society / AIP

Country of Publication:: United States

Language:: English

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