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Title: Correlation between vibrational temperature of N{sub 2} and plasma parameters in inductively coupled Ar/N{sub 2} plasmas

Vibrational temperature (T{sub vib}) of N{sub 2} gas and electron energy distribution function (EEDF) were measured in Ar/N{sub 2} mixture inductively coupled plasma (ICP). At a low gas pressure of 5 mTorr where the EEDF is bi-Maxwellian distribution, plasma density n{sub p} and T{sub vib} (from 7000 K to 5600 K) slightly decrease. However, remarkable decrease in n{sub p} and T{sub vib} is found with the dilution of N{sub 2} gas at a high gas pressure of 50 mTorr, where the EEDF is depleted Maxwellian distribution at a fixed ICP power of 150 W. When the ICP power increases from 150 W to 300 W at the gas pressure of 50 mTorr, the depleted tail on the EEDF is replenished, while n{sub p} is little changed with the dilution of N{sub 2} gas. In this case, T{sub vib} slightly decreases from 9500 K to 7600 K. These results indicate that the variation of T{sub vib} is strongly correlated to the plasma parameters, such as the plasma density and EEDF.
Authors:
 [1] ; ; ;  [2]
  1. Department of Nanoscale Semiconductor Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 133-791 (Korea, Republic of)
  2. Department of Electrical Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 133-791 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22490097
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 22; Journal Issue: 8; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ARGON; BOLTZMANN STATISTICS; DISTRIBUTION FUNCTIONS; ELECTRONS; ENERGY SPECTRA; MIXTURES; NITROGEN; PLASMA DENSITY; PRESSURE RANGE MEGA PA 10-100; TEMPERATURE RANGE OVER 4000 K