Consideration of the electron energy distribution function shape in a Ar and N{sub 2} global model
- Division of Energy Systems Research, Ajou University, Suwon 443-749 (Korea, Republic of)
- Universite de Toulouse, UPS, INPT, LAPLACE (Laboratoire Plasma et Conversion d'Energie), 118 route de Narbonne, F-31062 Toulouse cedex 9 (France)
This paper presents a method to compensate the effects of the electron energy distribution function (EEDF) shape on plasma characteristics when using global models to describe Ar and N{sub 2} inductively coupled discharges. A non-Maxwellian global model is developed for the pressure range 1-1000 mTorr by using an user-friendly Boltzmann equation solver to calculate the EEDF. The calculated EEDFs are compared with the measurements performed with a single Langmuir probe in the same conditions. We also compare the calculated results by using the Boltzmann equation solver with the results by assuming a Maxwellian EEDF and point out the influence of both methods on the contribution of the multi-step process on ionization. Finally, to take into account the shape of the EEDF in global models, abacuses are presented as a function of the absorbed power density and the pressure for typical Ar and N{sub 2} planar ICP discharges.
- OSTI ID:
- 22089540
- Journal Information:
- Journal of Applied Physics, Vol. 112, Issue 10; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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