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Title: Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis–catalysis testing tool

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.4928614· OSTI ID:22482751
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  1. Chemical Sciences and Engineering Division, Argonne National Laboratory, Lemont, Illinois 60439 (United States)
  2. Arradiance Inc., Sudbury, Massachusetts 01776 (United States)

An integrated atomic layer deposition synthesis-catalysis (I-ALD-CAT) tool was developed. It combines an ALD manifold in-line with a plug-flow reactor system for the synthesis of supported catalytic materials by ALD and immediate evaluation of catalyst reactivity using gas-phase probe reactions. The I-ALD-CAT delivery system consists of 12 different metal ALD precursor channels, 4 oxidizing or reducing agents, and 4 catalytic reaction feeds to either of the two plug-flow reactors. The system can employ reactor pressures and temperatures in the range of 10{sup −3} to 1 bar and 300–1000 K, respectively. The instrument is also equipped with a gas chromatograph and a mass spectrometer unit for the detection and quantification of volatile species from ALD and catalytic reactions. In this report, we demonstrate the use of the I-ALD-CAT tool for the synthesis of platinum active sites and Al{sub 2}O{sub 3} overcoats, and evaluation of catalyst propylene hydrogenation activity.

OSTI ID:
22482751
Journal Information:
Review of Scientific Instruments, Vol. 86, Issue 8; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
Country of Publication:
United States
Language:
English

Cited By (3)

Development of a scanning probe microscopy integrated atomic layer deposition system for in situ successive monitoring of thin film growth journal December 2018
New development of atomic layer deposition: processes, methods and applications journal May 2019
Atomic Layer Deposition of GdCoO3 and Gd0.9Ca0.1CoO3 journal December 2019