Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis–catalysis testing tool

Camacho-Bunquin, Jeffrey; Shou, Heng; Aich, Payoli; Beaulieu, David R.; Klotzsch, Helmut; Bachman, Stephen; Marshall, Christopher L.; Hock, Adam; Stair, Peter

doi:10.1063/1.4928614

Title: Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis–catalysis testing tool

Journal Article · Mon Aug 24 00:00:00 EDT 2015 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4928614· OSTI ID:1391821

Camacho-Bunquin, Jeffrey ^[1]; Shou, Heng ^[1]; Aich, Payoli ^[2]; Beaulieu, David R. ^[3]; Klotzsch, Helmut ^[3]; Bachman, Stephen ^[3];

^[1]; Hock, Adam ^[4]; Stair, Peter ^[5]

Argonne National Lab. (ANL), Lemont, IL (United States)
Argonne National Lab. (ANL), Lemont, IL (United States); Univ. of Illinois, Chicago, IL (United States)
Arradiance Inc., Sudbury, MA (United States)
Argonne National Lab. (ANL), Lemont, IL (United States); Illinois Inst. of Technology, Chicago, IL (United States)
Argonne National Lab. (ANL), Lemont, IL (United States); Northwestern Univ., Evanston, IL (United States)

An integrated atomic layer deposition-catalysis (I-ALD-CAT) tool was developed, combining an ALD manifold with a plug-flow reactor system for the synthesis of supported catalytic materials by ALD and immediate evaluation of catalyst reactivity using gas-phase probe reactions. The I-ALD-CAT system can deliver gaseous reagents comprised of 12 different metal ALD precursors, 4 oxidizing or reducing agents, and 4 catalytic reaction feeds to either of the two plug-flow reactors. The system can employ reactor pressures and temperatures in the range of 10^-3 to 1 bar and 300–1000 K, respectively. Furthermore, the instrument is also equipped with a gas chromatograph and a mass spectrometer unit for the detection and quantification of volatile species from ALD and catalytic reactions. In this report, we demonstrate the use of the I-ALD-CAT tool for the ALD of platinum active sites and Al₂O₃ overcoats, and evaluation of catalyst propylene hydrogenation activity.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Chemical Sciences, Geosciences, and Biosciences Division

Grant/Contract Number:: AC02-06CH11357; AC-02-06CH11357

OSTI ID:: 1391821

Alternate ID(s):: OSTI ID: 1229634

Journal Information:: Review of Scientific Instruments, Vol. 86, Issue 8; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 17 works

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Development of a scanning probe microscopy integrated atomic layer deposition system for in situ successive monitoring of thin film growth Cao, Kun; Hu, Quan; Cai, Jiaming Review of Scientific Instruments, Vol. 89, Issue 12 https://doi.org/10.1063/1.5042463	journal	December 2018
New development of atomic layer deposition: processes, methods and applications Oviroh, Peter Ozaveshe; Akbarzadeh, Rokhsareh; Pan, Dongqing Science and Technology of Advanced Materials, Vol. 20, Issue 1 https://doi.org/10.1080/14686996.2019.1599694	journal	May 2019
Atomic Layer Deposition of GdCoO3 and Gd0.9Ca0.1CoO3 Duparc, Marion; Sønsteby, Henrik Hovde; Nilsen, Ola Materials, Vol. 13, Issue 1 https://doi.org/10.3390/ma13010024	journal	December 2019

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