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Title: Nucleation, transition, and maturing of the self-assembled Au droplets on various type-A GaAs substrates

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.4893885· OSTI ID:22314350
; ;  [1];  [1]
  1. College of Electronics and Information, Kwangwoon University, Nowon-gu, Seoul 139-701 (Korea, Republic of)

In this study, the fabrication of self-assembled Au droplets is successfully demonstrated on various type-A GaAs substrates: (711)A, (511)A, (411)A, and (311)A. The nucleation of the self-assembled tiny Au clusters is observed at 300 °C. As an intermediate stage, corrugated Au nanostructures are clearly observed at 350 °C on various type-A GaAs surfaces, rarely witnessed on other substrates. Based on the Volmer-Weber growth mode, the dome-shaped Au droplets with excellent uniformities are successfully fabricated between 500 and 550 °C. As a function of annealing temperature, the self-assembled Au droplets show the increased dimensions including average height and diameter, compensated by the decreased average density. Depending on the substrate indices utilized, the size and density of Au droplets show clear differences throughout the whole temperature range. The results are symmetrically analyzed by using atomic force microscope images, cross-sectional line-profiles, size and density plots, height distribution histograms, and Fourier filter transform power spectra.

OSTI ID:
22314350
Journal Information:
Journal of Applied Physics, Vol. 116, Issue 8; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
Country of Publication:
United States
Language:
English

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