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Title: Fabrication of highly transparent diamond-like carbon anti-reflecting coating for Si solar cell application

ARC grade highly transparent unhydrogenated diamond-like carbon (DLC) films were produced, directly from a-C target, using RF magnetron sputtering deposition technique, for optoelectronic applications. Optical band gap, transmittance, reflectance, sp{sup 3} fraction, I{sub D}/I{sub G}, density, and refractive index of the films have been estimated with the help of optical tools like Uv-vis spectrophotometer, ellipsometer and micro-Raman. Optimum ARC-qualities have been identified in low-temperature grown DLC films at an Ar pressure of 4 mTorr in the reactor, accomplishing its key requirements for use in silicon solar cells.
Authors:
;  [1]
  1. Nano-Science Group, Energy Research Unit, Indian Association for the Cultivation of Science, Jadavpur, Kolkata-700032 (India)
Publication Date:
OSTI Identifier:
22271043
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1591; Journal Issue: 1; Conference: 58. DAE solid state physics symposium 2013, Patiala, Punjab (India), 17-21 Dec 2013; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ABSORPTION SPECTROSCOPY; DENSITY; DEPOSITION; DIAMONDS; ELECTRONIC STRUCTURE; ELLIPSOMETRY; ENERGY GAP; OPACITY; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; SILICON SOLAR CELLS; SPECTRAL REFLECTANCE; SPECTROPHOTOMETRY; SPUTTERING; THIN FILMS