Deposition of diamond-like carbon (DLC) with picosecond laser pulses
- Univ. of Florida, Gainesville, FL (United States). Dept. of Materials Science and Engineering
- Univ. of Michigan, Ann Arbor, MI (United States). Center for Ultrafast Optical Science
The authors deposited unhydrogenated diamond-like carbon (DLC) thin films by laser ablation of graphite, using a high power Ti: Sapphire solid state laser system. DLC films were deposited onto single crystal silicon substrates at room temperature with picosecond laser pulses, at peak power densities in the 5 {times} 10{sup 11}--8 {times} 10{sup 12} W/cm{sup 2} range. A variety of techniques, including scanning and transmission electron microscopy (SEM and TEM), Raman spectroscopy, spectroscopic ellipsometry (SE), and electron energy loss spectroscopy (EELS) have been used to analyze the film quality. Smooth, partially transparent films were produced, distinct from the graphite target. Sp{sup 3} volume fractions were found to be in the 50--60% range, with optical bandgaps ranging from 0.6 to 1.2 eV, depending on the laser power density.
- OSTI ID:
- 375981
- Report Number(s):
- CONF-941144--; ISBN 1-55899-255-3
- Country of Publication:
- United States
- Language:
- English
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