Femtosecond laser deposition of diamond-like carbon films
- Univ. of Florida, Gainesville, FL (United States). Dept. of Materials Science and Engineering
- Univ. of Michigan, Ann Arbor, MI (United States). Center for Ultrafast Optical Science
- Ford Research Lab., Dearborn, MI (United States)
The authors have deposited unhydrogenated diamond-like carbon (DLC) films with 100 femtosecond laser pulses, at intensities in the 3 {times} 10{sup 14}--6.5 {times} 10{sup 15} W/cm{sup 2} range. Film surface topography, optical property, and bonding structure were examined, respectively, with atomic force microscopy (AFM), spectroscopic ellipsometry (SE) and Raman spectrometry. The femtosecond pulse generated plasma was studied through time-of-flight (TOF) experiment. The most probable kinetic energy of carbon ions was estimated to be in the 300--2,000 eV range, increasing with laser intensity. In addition, a unique suprathermal component with kinetic energy ranging from 4 to 40 keV was observed in the TOF spectrum. This high energy peak is believed to originate from fast ions in a solid density plasma created during the absorption of each femtosecond laser pulse.
- Sponsoring Organization:
- National Science Foundation, Washington, DC (United States)
- OSTI ID:
- 490855
- Report Number(s):
- CONF-951155--; ISBN 1-55899-300-2
- Country of Publication:
- United States
- Language:
- English
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