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Title: Elastic properties of B-C-N films grown by N{sub 2}-reactive sputtering from boron carbide targets

Boron-carbon-nitrogen films were grown by RF reactive sputtering from a B{sub 4}C target and N{sub 2} as reactive gas. The films present phase segregation and are mechanically softer than boron carbide films (a factor of more than 2 in Young's modulus). This fact can turn out as an advantage in order to select buffer layers to better anchor boron carbide films on substrates eliminating thermally induced mechanical tensions.
Authors:
; ; ;  [1] ;  [1] ;  [2] ; ; ;  [3]
  1. Instituto de Ciencia de Materiales de Madrid, Consejo Superior de Investigaciones Científicas, Cantoblanco, 28049 Madrid (Spain)
  2. (Spain)
  3. Centro de Microanálisis de Materiales, Universidad Autónoma de Madrid, Cantoblanco, 28049 Madrid (Spain)
Publication Date:
OSTI Identifier:
22217823
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 114; Journal Issue: 21; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; BORON; BORON CARBIDES; CARBON; DEPOSITION; ELASTICITY; LAYERS; NITROGEN; SEGREGATION; SPUTTERING; SUBSTRATES; THIN FILMS; YOUNG MODULUS