Spatially resolved argon microplasma diagnostics by diode laser absorption

Journal Article · Sat Jan 01 00:00:00 EST 2011 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3531557· OSTI ID:21538004

Miura, Naoto; Hopwood, Jeffrey ^[1]

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1. Electrical and Computer Engineering, Tufts University, 161 College Avenue, Medford, Massachusetts 02155 (United States)

Microplasmas were diagnosed by spatially resolved diode laser absorption using the Ar 801.4 nm transition (1s{sub 5}-2p{sub 8}). A 900 MHz microstrip split ring resonator was used to excite the microplasma which was operated between 100-760 Torr (13-101 kPa). The gas temperatures and the Ar 1s{sub 5} line-integrated densities were obtained from the atomic absorption lineshape. Spatially resolved data were obtained by focusing the laser to a 30 {mu}m spot and translating the laser path through the plasma with an xyz microdrive. At 1 atm, the microplasma has a warm core (850 K) that spans 0.2 mm and a steep gradient to room temperature at the edge of the discharge. At lower pressure, the gas temperature decreases and the spatial profiles become more diffuse.

• OSTI ID: 21538004
• Journal Information: Journal of Applied Physics, Vol. 109, Issue 1; Other Information: DOI: 10.1063/1.3531557; (c) 2011 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

74 ATOMIC AND MOLECULAR PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ABSORPTION
ARGON
ELECTRIC DISCHARGES
ELECTRON TEMPERATURE
ENERGY-LEVEL TRANSITIONS
ION TEMPERATURE
MHZ RANGE
PLASMA
PLASMA DENSITY
PLASMA DIAGNOSTICS
RESONATORS
RINGS
SEMICONDUCTOR LASERS
TEMPERATURE RANGE 0273-0400 K
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FLUIDS
FREQUENCY RANGE
GASES
LASERS
NONMETALS
RARE GASES
SEMICONDUCTOR DEVICES
SOLID STATE LASERS
SORPTION
TEMPERATURE RANGE