Argon metastable density and temperature of a 94 GHz microplasma

Navarro, Rafael; Hopwood, Jeffrey

doi:10.1063/5.0182148

Argon metastable density and temperature of a 94 GHz microplasma

Journal Article · Mon Jan 22 00:00:00 EST 2024 · Journal of Applied Physics

DOI:https://doi.org/10.1063/5.0182148· OSTI ID:2282145

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Tufts University, Medford, MA (United States); Tufts University
Tufts University, Medford, MA (United States)

Laser diode absorption spectroscopy is used to experimentally measure Ar(1s₅) metastable density and translational gas temperature within a 94 GHz microplasma. A square two-dimensional photonic crystal (PhC) at this resonance frequency serves to ignite and sustain the plasma from 20 to 200 Torr (2.7 × 10³–2.7 × 10⁴ Pa) by using millimeter wave power from 300 to 1000 mW. Metastable density within the plasma is estimated from the absorption line shape of the laser traversing the PhC. The metastable density reaches an order of 10¹⁹ m^–3 at lower pressure and decreases as pressure increases. From the Lorentzian line shape of the absorption profile at 811.53 nm, the gas temperature is extracted and found to increase from 500 K at 20 Torr to 1300 K at 200 Torr. Furthermore, these data are analyzed and compared with a zero-dimensional plasma model and with previous experimental plasma results at 43 GHz.

View Accepted Manuscript (DOE)

Research Organization:: Tufts University, Medford, MA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Fusion Energy Sciences (FES)

Grant/Contract Number:: SC0021249

OSTI ID:: 2282145

Journal Information:: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 4 Vol. 135; ISSN 0021-8979

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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