Formation mechanisms of metallic Zn nanodots by using ZnO thin films deposited on n-Si substrates
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon 305-701 (Korea, Republic of)
- Max Plank Institute of Microstructure Physics, D-06120 Halle (Saale) (Germany)
- Department of Electronics and Computer Engineering, National Research Laboratory for Nano Quantum Electronics Devices, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791 (Korea, Republic of)
- Thin Film Materials Research Center, Korea Institute of Science and Technology, Seoul 136-791 (Korea, Republic of)
High-resolution transmission electron microscopy and energy dispersive x-ray spectroscopy results showed that metallic Zn nanodots (NDs) were fabricated through transformation of ZnO thin films by deposition of SiO{sub x} on ZnO/n-Si (100) heterostructures. The Zn NDs with various sizes and densities were formed due to the occurrence of the mass diffusion of atoms along the grain boundaries in the ZnO thin films. The fabrication mechanisms of metallic Zn NDs through transformation of ZnO thin films deposited on n-Si substrates are described on the basis of the experimental results.
- OSTI ID:
- 21466885
- Journal Information:
- Applied Physics Letters, Vol. 97, Issue 6; Other Information: DOI: 10.1063/1.3475016; (c) 2010 American Institute of Physics; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
77 NANOSCIENCE AND NANOTECHNOLOGY
36 MATERIALS SCIENCE
ATOMIC FORCE MICROSCOPY
DENSITY
DEPOSITION
DIFFUSION
ETCHING
FABRICATION
GRAIN BOUNDARIES
N-TYPE CONDUCTORS
QUANTITATIVE CHEMICAL ANALYSIS
QUANTUM DOTS
SILICON
SILICON OXIDES
SPUTTERING
SUBSTRATES
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY
X-RAY SPECTROSCOPY
ZINC
ZINC OXIDES
CHALCOGENIDES
CHEMICAL ANALYSIS
ELECTRON MICROSCOPY
ELEMENTS
FILMS
MATERIALS
METALS
MICROSCOPY
MICROSTRUCTURE
NANOSTRUCTURES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SEMICONDUCTOR MATERIALS
SEMIMETALS
SILICON COMPOUNDS
SPECTROSCOPY
SURFACE FINISHING
ZINC COMPOUNDS
36 MATERIALS SCIENCE
ATOMIC FORCE MICROSCOPY
DENSITY
DEPOSITION
DIFFUSION
ETCHING
FABRICATION
GRAIN BOUNDARIES
N-TYPE CONDUCTORS
QUANTITATIVE CHEMICAL ANALYSIS
QUANTUM DOTS
SILICON
SILICON OXIDES
SPUTTERING
SUBSTRATES
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY
X-RAY SPECTROSCOPY
ZINC
ZINC OXIDES
CHALCOGENIDES
CHEMICAL ANALYSIS
ELECTRON MICROSCOPY
ELEMENTS
FILMS
MATERIALS
METALS
MICROSCOPY
MICROSTRUCTURE
NANOSTRUCTURES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SEMICONDUCTOR MATERIALS
SEMIMETALS
SILICON COMPOUNDS
SPECTROSCOPY
SURFACE FINISHING
ZINC COMPOUNDS