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Title: Machine Protection System for the Stepper Motor Actuated SyLMAND Mirrors

SyLMAND, the Synchrotron Laboratory for Micro and Nano Devices at the Canadian Light Source, consists of a dedicated X-ray lithography beamline on a bend magnet port, and process support laboratories in a clean room environment. The beamline includes a double mirror system with flat, chromium-coated silicon mirrors operated at varying grazing angles of incidence (4 mrad to 45 mrad) for spectral adjustment by high energy cut-off. Each mirror can be independently moved by two stepper motors to precisely control the pitch and vertical position. We present in this paper the machine protection system implemented in the double mirror system to allow for safe operation of the two mirrors and to avoid consequences of potential stepper motor malfunction.
Authors:
; ; ;  [1] ;  [2] ;  [3] ;  [4] ;  [2] ;  [3] ;  [5]
  1. Canadian Light Source, 101 Perimeter Road, Saskatoon, SK S7N 0X4 (Canada)
  2. Department of Electrical and Computer Engineering, University of Saskatchewan, 57 Campus Dr., Saskatoon, SK S7N 5A9 (Canada)
  3. (Canada)
  4. (Germany)
  5. Karlsruhe Institute of Technology, Postfach 3640, D-76021 Karlsruhe (Germany)
Publication Date:
OSTI Identifier:
21410332
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1234; Journal Issue: 1; Conference: SRI 2009: 10. international conference on radiation instrumentation, Melbourne (Australia), 27 Sep - 2 Oct 2009; Other Information: DOI: 10.1063/1.3463323; (c) 2010 American Institute of Physics
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; DATA ACQUISITION; LIGHT SOURCES; MAGNETS; MIRRORS; OPTICS; POTENTIALS; SAFETY; SILICON; SYNCHROTRON RADIATION SOURCES; SYNCHROTRONS; X RADIATION ACCELERATORS; CYCLIC ACCELERATORS; ELECTROMAGNETIC RADIATION; ELEMENTS; EQUIPMENT; IONIZING RADIATIONS; RADIATION SOURCES; RADIATIONS; SEMIMETALS