Direct growth of transparent conducting Nb-doped anatase TiO{sub 2} polycrystalline films on glass
- Kanagawa Academy of Science and Technology (KAST), Kanagawa 213-0012 (Japan)
This paper proposes a novel sputter-based method for the direct growth of transparent conducting Ti{sub 1-x}Nb{sub x}O{sub 2} (TNO) polycrystalline films on glass, without the need for any postdeposition treatments, by the use of an initial seed-layer. Anatase TNO epitaxial films grown on LaAlO{sub 3} (100) substrates under a reducing atmosphere exhibited a low resistivity (rho) of (3-6)x10{sup -4} OMEGA cm. On glass, however, highly resistive rutile phase polycrystalline films (rhoapprox100 OMEGA cm) formed preferentially under the same conditions. These results suggest that epitaxial stabilization of the oxygen-deficient anatase phase occurs on lattice-matched substrates. To produce a similar effect on a glass surface, we deposited a seed-layer of anatase TNO with excellent crystallinity under an increased oxygen atmosphere. As a result, anatase phase TNO polycrystalline films could be grown even under heavily reducing atmospheres. An optimized film exhibited rho=1.1x10{sup -3} OMEGA cm and optical absorption lower than 10% in the visible region. This rho value is more than one order of magnitude lower than values reported for directly deposited TNO polycrystalline films. This indicates that the seed-layer method has considerable potential for producing transparent conducting TNO polycrystalline films on glass.
- OSTI ID:
- 21352259
- Journal Information:
- Journal of Applied Physics, Vol. 105, Issue 12; Other Information: DOI: 10.1063/1.3148267; (c) 2009 American Institute of Physics; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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ABSORPTION
ALUMINATES
CRYSTAL GROWTH
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EPITAXY
GLASS
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LAYERS
NIOBIUM
OXYGEN
POLYCRYSTALS
RUTILE
SEMICONDUCTOR MATERIALS
SPUTTERING
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CHALCOGENIDES
CRYSTAL GROWTH METHODS
CRYSTALS
ELECTRICAL PROPERTIES
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MINERALS
NONMETALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIOACTIVE MATERIALS
RADIOACTIVE MINERALS
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TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS