Development of measurement technique for carbon atoms employing vacuum ultraviolet absorption spectroscopy with a microdischarge hollow-cathode lamp and its application to diagnostics of nanographene sheet material formation plasmas

Journal Article · Mon Jun 01 00:00:00 EDT 2009 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3091279· OSTI ID:21352219

Takeuchi, Wakana; Sasaki, Hajime; Takashima, Seigo ^[1]; Kato, Satoru; Hiramatsu, Mineo ^[2]; Hori, Masaru ^[1]

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1. Department of Electric Engineering and Computer Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603 (Japan)
2. Department of Electrical and Electronic Engineering, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502 (Japan)

This study describes the development of a compact measurement technique for absolute carbon (C) atom density in processing plasmas, using vacuum ultraviolet absorption spectroscopy (VUVAS) employing a high-pressure CO{sub 2} microdischarge hollow-cathode lamp (C-MHCL) as the light source. The characteristics of the C-MHCL as a resonance line source of C atoms at 165.7 nm for VUVAS measurements of the absolute C atom density are reported. The emission line profile of the C-MHCL under typical operating conditions was estimated to be the Voigt profile with a DELTAnu{sub L}/DELTAnu{sub D} value of 2.5, where DELTAnu{sub L} is the Lorentz width and DELTAnu{sub D} is the Doppler width. In order to investigate the behavior of C and H atoms in the processing plasma used for the fabrication of two-dimensional nanographene sheet material, measurements of the atom densities were carried out using the VUVAS technique. The H atom density increased with increasing pressure, while the C atom density was almost constant at 5x10{sup 12} cm{sup -3}. The density ratio of C to H atoms in the plasma was found to influence the morphology of carbon nanowalls (CNWs). With increasing H/C density ratio, the growth rate decreased and the space between the walls of the CNWs became wider.

• OSTI ID: 21352219
• Journal Information: Journal of Applied Physics, Vol. 105, Issue 11; Other Information: DOI: 10.1063/1.3091279; (c) 2009 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY
ABSORPTION SPECTROSCOPY
CARBON
CARBON DIOXIDE
GLOW DISCHARGES
HOLLOW CATHODES
LIGHT BULBS
LIGHT SOURCES
MESONS
MORPHOLOGY
NANOSTRUCTURES
PLASMA
PLASMA DIAGNOSTICS
TWO-DIMENSIONAL CALCULATIONS
ULTRAVIOLET RADIATION
ULTRAVIOLET SPECTRA
BOSONS
CARBON COMPOUNDS
CARBON OXIDES
CATHODES
CHALCOGENIDES
ELECTRIC DISCHARGES
ELECTRODES
ELECTROMAGNETIC RADIATION
ELEMENTARY PARTICLES
ELEMENTS
HADRONS
NONMETALS
OXIDES
OXYGEN COMPOUNDS
RADIATION SOURCES
RADIATIONS
SPECTRA
SPECTROSCOPY